Cause Diagnosis Method of Semiconductor Defects using Block-based Clustering and Histogram x2Distance
2012 ◽
Vol 15
(9)
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pp. 1149-1155
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2020 ◽
Vol 64
(1-4)
◽
pp. 137-145
2013 ◽
Vol 133
(10)
◽
pp. 1976-1982
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2016 ◽
Vol E99.B
(12)
◽
pp. 2550-2558
2013 ◽
Vol E96.A
(4)
◽
pp. 769-779
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