A Study on Active Vibration Isolation System Design for High Precision Fabrication Table Based on Noninteracting Control Theory

2021 ◽  
Vol 25 (3) ◽  
pp. 62-71
Author(s):  
Hwan-Cheol Park ◽  
Young-Bok Kim ◽  
Ji-Hyun Jeong
Keyword(s):  
Control Theory ◽  
System Design ◽  
High Precision ◽  
Vibration Isolation ◽  
Isolation System ◽  
Vibration Isolation System ◽  
Active Vibration ◽  
Active Vibration Isolation

Low-frequency active vibration isolation system

1994 ◽  
Author(s):  
Robin T. Stebbins ◽  
David Newell ◽  
Sam N. Richman ◽  
Peter L. Bender ◽  
James E. Faller ◽  
...  
Keyword(s):  
Vibration Isolation ◽  
Low Frequency ◽  
Isolation System ◽  
Vibration Isolation System ◽  
Active Vibration ◽  
Active Vibration Isolation
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