Investigation on a Linear Piezoelectric Actuator Based on Stick-Slip/Scan Excitation

To perform a high resolution and long stroke application in optical precision instruments, a linear piezoelectric actuator operated in stick-slip/scan modes for driving a linear motion table is presented. The proposed piezoelectric actuator is a piezoelectric composite structure, which includes a metal elastomer, a piezoelectric stack, and a frictional ball. The purpose of this paper is to describe the operation principle, design, and the running test and resolution test of the linear motion table driven by the proposed piezoelectric actuator. The notable feature is the flexible hinges of the actuator, including composite hinge, pre-pressure adjustment flexible hinge, and transmission flexible hinge, which are designed for decoupling the motion in the action direction of the piezoelectric stack and the direction in which the pre-pressure is applied. A prototype has been fabricated and two operation modes of the piezoelectric actuator, stick-slip and scan mode, were utilized to test the driving characteristics of the linear motion table. Experimental results show that the finest step resolutions in stick-slip mode and scan mode achieved 12 nm and 4 nm, respectively.

Research on a New Type of Rigid-Flexible Coupling 3-DOF Micro-Positioning Platform

A new type of rigid-flexible coupling three degrees of freedom (3-DOF) micro-positioning platform with high positioning accuracy and high bearing capacity is developed, which consists of flexible drive mechanism and rigid platform. The flexible drive mechanism consists of three sets of symmetrical parallel round flexible hinge structures, each with a wedge structure in the middle of the symmetrical parallel flexible hinge. The rigid platform has an inclined plane with the same angle as the wedge, while the wedge structure is used to achieve the self-locking effect. The flexibility matrix method and ANSYS are used to analyze the statics of the flexible drive mechanism. The first four natural frequencies of the platform are obtained by dynamic simulation analysis. A symmetrical rigid flexible coupling micro-positioning platform experimental system is developed. Output characteristics, positioning accuracy, relationship between frequency and amplitude, and bearing performance of the micro-positioning platform are tested. These experimental results obviously show that the micro-positioning platform has good motion characteristics, high positioning accuracy, large movement distance, and large load bearing capacity performance.