chemical vapor etching
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Investigation on the formation mechanism, structure and optical properties of ultra-narrow silicon nanowires by chemical vapor etching

10.17760/d20398284 ◽

2020 ◽

Author(s):

Sen Gao

Keyword(s):

Optical Properties ◽

Formation Mechanism ◽

Silicon Nanowires ◽

Chemical Vapor ◽

Chemical Vapor Etching

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Thermal Selective Vapor Etching of TiO2: Chemical Vapor Etching via WF6 and Self-Limiting Atomic Layer Etching Using WF6 and BCl3

Chemistry of Materials ◽

10.1021/acs.chemmater.7b00985 ◽

2017 ◽

Vol 29 (16) ◽

pp. 6653-6665 ◽

Author(s):

Paul C. Lemaire ◽

Gregory N. Parsons

Keyword(s):

Chemical Vapor ◽

Atomic Layer ◽

Chemical Vapor Etching ◽

Atomic Layer Etching

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Effect of Silver-Assisted Chemical Vapor Etching on morphological properties and silicon solar cell performance

Materials Science in Semiconductor Processing ◽

10.1016/j.mssp.2017.02.019 ◽

2017 ◽

Vol 63 ◽

pp. 176-183 ◽

Author(s):

Chohdi Amri ◽

Rachid Ouertani ◽

Abderrahmen Hamdi ◽

Hatem Ezzaouia

Keyword(s):

Silicon Solar Cell ◽

Chemical Vapor ◽

Cell Performance ◽

Morphological Properties ◽

Solar Cell Performance ◽

Chemical Vapor Etching

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Improvement of multicrystalline silicon solar cell performance via chemical vapor etching method-based porous silicon nanostructures

Solar Energy ◽

10.1016/j.solener.2012.01.031 ◽

2012 ◽

Vol 86 (5) ◽

pp. 1411-1415 ◽

Author(s):

Ben Rabha Mohamed ◽

Hajjaji Anouar ◽

Bessais Brahim

Keyword(s):

Porous Silicon ◽

Silicon Solar Cell ◽

Chemical Vapor ◽

Cell Performance ◽

Multicrystalline Silicon ◽

Silicon Nanostructures ◽

Solar Cell Performance ◽

Etching Method ◽

Chemical Vapor Etching

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The use of chemical vapor etching in multicrystalline silicon solar cells

The European Physical Journal Applied Physics ◽

10.1051/epjap/2009085 ◽

2009 ◽

Vol 47 (1) ◽

pp. 10301 ◽

Author(s):

M. Ben Rabha ◽

M. F. Boujmil ◽

M. Saadoun ◽

B. Bessaïs

Keyword(s):

Solar Cells ◽

Chemical Vapor ◽

Multicrystalline Silicon ◽

Silicon Solar Cells ◽

Chemical Vapor Etching

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Application of the chemical vapor-etching in polycrystalline silicon solar cells

Applied Surface Science ◽

10.1016/j.apsusc.2005.01.028 ◽

2005 ◽

Vol 252 (2) ◽

pp. 488-493 ◽

Author(s):

M. Ben Rabha ◽

M. Saadoun ◽

M.F. Boujmil ◽

B. Bessaïs ◽

H. Ezzaouia ◽

...

Keyword(s):

Solar Cells ◽

Polycrystalline Silicon ◽

Chemical Vapor ◽

Silicon Solar Cells ◽

Chemical Vapor Etching

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Chemical vapor etching of copper using oxygen and 1,1,1,5,5,5-hexafluoro-2,4-pentanedione

Thin Solid Films ◽

10.1016/s0040-6090(98)01157-2 ◽

1999 ◽

Vol 342 (1-2) ◽

pp. 221-229 ◽

Author(s):

Richard Steger ◽

Rich Masel

Keyword(s):

Chemical Vapor ◽

Chemical Vapor Etching

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