Handbook of Silicon Based MEMS Materials and Technologies
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Published By Elsevier

9780815515944

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Non-destructive Bond Strength Testing of Anodic Bonded Wafers

Handbook of Silicon Based MEMS Materials and Technologies ◽

10.1016/b978-0-8155-1594-4.00036-x ◽

2010 ◽

pp. 551-554

Author(s):

Roy Knechtel

Keyword(s):

Bond Strength ◽

Strength Testing ◽

Non Destructive

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Optical Measurement of Static and Dynamic Displacement in MEMS

Handbook of Silicon Based MEMS Materials and Technologies ◽

10.1016/b978-0-8155-1594-4.00017-6 ◽

2010 ◽

pp. 299-304 ◽

Author(s):

David Horsley

Keyword(s):

Optical Measurement ◽

Dynamic Displacement

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Introduction to Measuring MEMS

Handbook of Silicon Based MEMS Materials and Technologies ◽

10.1016/b978-0-8155-1594-4.00015-2 ◽

2010 ◽

pp. 283-287

Author(s):

Veli-Matti Airaksinen

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Optical Modeling of MEMS

Handbook of Silicon Based MEMS Materials and Technologies ◽

10.1016/b978-0-8155-1594-4.00013-9 ◽

2010 ◽

pp. 239-258

Author(s):

Timo Aalto ◽

Juuso Olkkonen

Keyword(s):

Optical Modeling

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Czochralski Growth of Silicon Crystals

Handbook of Silicon Based MEMS Materials and Technologies ◽

10.1016/b978-0-8155-1594-4.00002-4 ◽

2010 ◽

pp. 19-36 ◽

Author(s):

Olli Anttila

Keyword(s):

Czochralski Growth ◽

Silicon Crystals

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Deep Reactive Ion Etching

Handbook of Silicon Based MEMS Materials and Technologies ◽

10.1016/b978-0-8155-1594-4.00023-1 ◽

2010 ◽

pp. 349-374 ◽

Author(s):

Franz Laermer ◽

Sami Franssila ◽

Lauri Sainiemi ◽

Kai Kolari

Keyword(s):

Reactive Ion Etching ◽

Ion Etching ◽

Deep Reactive Ion Etching

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Glass Frit Bonding

Handbook of Silicon Based MEMS Materials and Technologies ◽

10.1016/b978-0-8155-1594-4.00033-4 ◽

2010 ◽

pp. 521-531 ◽

Author(s):

Roy Knechtel

Keyword(s):

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Wafer-Bonding Equipment

Handbook of Silicon Based MEMS Materials and Technologies ◽

10.1016/b978-0-8155-1594-4.00037-1 ◽

2010 ◽

pp. 555-568 ◽

Author(s):

Viorel Dragoi ◽

Paul Lindner

Keyword(s):

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Metallic Glass

Handbook of Silicon Based MEMS Materials and Technologies ◽

10.1016/b978-0-8155-1594-4.00027-9 ◽

2010 ◽

pp. 447-472 ◽

Author(s):

Parmanand Sharma ◽

Akihisa Inoue

Keyword(s):

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List of Contributors

Handbook of Silicon Based MEMS Materials and Technologies ◽

10.1016/b978-0-8155-1594-4.00050-4 ◽

2010 ◽

pp. xi-xiii

Author(s):

Timo Aalto ◽

Veli-Matti Airaksinen ◽

Marco Amiotti ◽

Olli Anttila ◽

Paul A. Anzalone ◽

...

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