Handbook of Thin Film Process Technology
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Published By CRC Press

9781351072786
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AC and RF Reactive Sputtering

2018 ◽  
pp. A5.2:1-A5.2:9 ◽  
Author(s):  
Grant O Este ◽  
William D Westwood
Keyword(s):  
Reactive Sputtering

Modeling of the Reactive Sputtering Process

2018 ◽  
pp. A5.3:1-A5.3:15
Author(s):  
S Berg ◽  
T Nyberg ◽  
H-O Blom ◽  
C Nender
Keyword(s):  
Reactive Sputtering

Physical Deposition Techniques

2018 ◽  
pp. A5.0:1-A5.0:1
Author(s):  
Glocker David A ◽  
S Ismat Shah
Keyword(s):  
Physical Deposition ◽  
Deposition Techniques
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