2018 International Symposium on Semiconductor Manufacturing (ISSM)
Latest Publications

TOTAL DOCUMENTS

57
(FIVE YEARS 0)

H-INDEX

2
(FIVE YEARS 0)

Published By IEEE

9781538662687
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Design of underfill materials for the latest package

2018 ◽  
Author(s):  
Osamu Suzuki ◽  
Toshiaki Enomoto ◽  
Kiyoshi Kotaka

Super-multipoint thickness measurement technology using optical macro inspection system

2018 ◽  
Author(s):  
Takayuki Hamada ◽  
Kuniharu Nagashima ◽  
Naoki Kanda ◽  
Nao Sato ◽  
Kuniaki Takeda ◽  
...  
Keyword(s):  
Thickness Measurement ◽  
Inspection System ◽  
Measurement Technology

Machine Learning Approaches for Process Optimization

2018 ◽  
Author(s):  
Yusuke Suzuki ◽  
Shinya Iwashita ◽  
Toshiki Sato ◽  
Hitoshi Yonemichi ◽  
Hironori Moki ◽  
...  
Keyword(s):  
Machine Learning ◽  
Process Optimization ◽  
Learning Approaches

Inline scratch defect detection at post CMP step in FinFET device processing

2018 ◽  
Author(s):  
Mohammed Imrul Hossain ◽  
Sean Le ◽  
Dale R Sheu
Keyword(s):  
Defect Detection ◽  
Device Processing

Unveil the Black Box for Performance Efficiency of OEE for Semiconductor Wafer Fabrication

2018 ◽  
Author(s):  
Chih-Min Yu ◽  
Chung-Jen Kuo ◽  
Chih-Lin Chiu ◽  
Wei-Chin Wen ◽  
Minghua Zhang
Keyword(s):  
Black Box ◽  
Wafer Fabrication ◽  
Semiconductor Wafer ◽  
Semiconductor Wafer Fabrication
Load More ...
Sign in / Sign up

Export Citation Format

Share Document