Handbook of Semiconductor Manufacturing Technology
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35
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Published By CRC Press

9781315213934
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Oxidation and Gate Dielectrics

2017 ◽  
pp. 9-1-9-37
Author(s):  
C. Rinn Cleavelin ◽  
Luigi Colombo ◽  
Hiro Niimi ◽  
Sylvia Pas ◽  
Eric M. Vogel
Keyword(s):  
Gate Dielectrics

Ion Implantation

2017 ◽  
pp. 7-1-7-88
Author(s):  
Michael Ameen ◽  
Ivan Berry ◽  
Walter Class ◽  
Hans-Joachim Gossmann ◽  
Leonard Rubin
Keyword(s):  
Ion Implantation

Photoresist Materials and Processing

2017 ◽  
pp. 19-1-19-57
Author(s):  
César M. Garza ◽  
Will Conley ◽  
Jeff Byers

Low-k Dielectrics

2017 ◽  
pp. 12-1-12-22
Author(s):  
Ting Y. Tsui ◽  
Andrew J. McKerrow
Keyword(s):  
Low K

Surface Preparation

2017 ◽  
pp. 5-1-5-36
Author(s):  
Glenn W. Gale ◽  
Brian K. Kirkpatrick ◽  
Frederick W. Kern
Keyword(s):  
Surface Preparation

Yield Management

2017 ◽  
pp. 27-1-27-29
Author(s):  
Louis Breaux ◽  
Sean Collins
Keyword(s):  
Yield Management
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