Capacitive Silicon Resonators
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TOTAL DOCUMENTS

12

(FIVE YEARS 12)

H-INDEX

0

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Published By CRC Press

9780429266010

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

A Long-Bar-Type Capacitive Silicon Resonator with a High Quality Factor

Capacitive Silicon Resonators ◽

10.1201/9780429266010-5 ◽

2019 ◽

pp. 57-66

Author(s):

Nguyen Van Toan ◽

Takahito Ono

Keyword(s):

Quality Factor ◽

High Quality Factor ◽

High Quality ◽

Silicon Resonator

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Mechanically Coupled Capacitive Nanomechanical Silicon Resonators

Capacitive Silicon Resonators ◽

10.1201/9780429266010-8 ◽

2019 ◽

pp. 101-114

Author(s):

Nguyen Van Toan ◽

Takahito Ono

Keyword(s):

Silicon Resonators

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Capacitive Silicon Resonators Using Neutral Beam Etching Technology

Capacitive Silicon Resonators ◽

10.1201/9780429266010-6 ◽

2019 ◽

pp. 66-81

Author(s):

Nguyen Van Toan ◽

Takahito Ono

Keyword(s):

Neutral Beam ◽

Silicon Resonators ◽

Neutral Beam Etching

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Hermetically Packaged Capacitive Silicon Resonators on LTCC Substrate

Capacitive Silicon Resonators ◽

10.1201/9780429266010-4 ◽

2019 ◽

pp. 40-55

Author(s):

Nguyen Van Toan ◽

Takahito Ono

Keyword(s):

Silicon Resonators ◽

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Capacitive Silicon Resonator Structures

Capacitive Silicon Resonators ◽

10.1201/9780429266010-2 ◽

2019 ◽

pp. 9-20

Author(s):

Nguyen Van Toan ◽

Takahito Ono

Keyword(s):

Silicon Resonator

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Conclusions

Capacitive Silicon Resonators ◽

10.1201/9780429266010-12 ◽

2019 ◽

pp. 155-157

Author(s):

Nguyen Van Toan ◽

Takahito Ono

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Capacitive Silicon Resonators with Piezoresistive Heat Engines

Capacitive Silicon Resonators ◽

10.1201/9780429266010-11 ◽

2019 ◽

pp. 141-154

Author(s):

Nguyen Van Toan ◽

Takahito Ono

Keyword(s):

Heat Engines ◽

Silicon Resonators

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Capacitive Silicon Resonators with Movable Electrode Structures

Capacitive Silicon Resonators ◽

10.1201/9780429266010-10 ◽

2019 ◽

pp. 125-140

Author(s):

Nguyen Van Toan ◽

Takahito Ono

Keyword(s):

Movable Electrode ◽

Silicon Resonators

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Capacitive Silicon Nanomechanical Resonators with Selective Vibration of High-Order Mode

Capacitive Silicon Resonators ◽

10.1201/9780429266010-9 ◽

2019 ◽

pp. 115-124

Author(s):

Nguyen Van Toan ◽

Takahito Ono

Keyword(s):

High Order Mode ◽

Nanomechanical Resonators

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Capacitive Silicon Resonators with Narrow Gaps Formed by Metal-Assisted Chemical Etching

Capacitive Silicon Resonators ◽

10.1201/9780429266010-7 ◽

2019 ◽

pp. 82-98

Author(s):

Nguyen Van Toan ◽

Takahito Ono

Keyword(s):

Chemical Etching ◽

Metal Assisted Chemical Etching ◽

Silicon Resonators ◽

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