Capacitive Silicon Resonators
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Published By CRC Press

9780429266010
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A Long-Bar-Type Capacitive Silicon Resonator with a High Quality Factor

2019 ◽  
pp. 57-66
Author(s):  
Nguyen Van Toan ◽  
Takahito Ono
Keyword(s):  
Quality Factor ◽  
High Quality Factor ◽  
High Quality ◽  
Silicon Resonator

Mechanically Coupled Capacitive Nanomechanical Silicon Resonators

2019 ◽  
pp. 101-114
Author(s):  
Nguyen Van Toan ◽  
Takahito Ono
Keyword(s):  
Silicon Resonators

Capacitive Silicon Resonators Using Neutral Beam Etching Technology

2019 ◽  
pp. 66-81
Author(s):  
Nguyen Van Toan ◽  
Takahito Ono
Keyword(s):  
Neutral Beam ◽  
Silicon Resonators ◽  
Neutral Beam Etching

Hermetically Packaged Capacitive Silicon Resonators on LTCC Substrate

2019 ◽  
pp. 40-55
Author(s):  
Nguyen Van Toan ◽  
Takahito Ono
Keyword(s):  
Silicon Resonators ◽  
Ltcc Substrate

Capacitive Silicon Resonator Structures

2019 ◽  
pp. 9-20
Author(s):  
Nguyen Van Toan ◽  
Takahito Ono
Keyword(s):  
Silicon Resonator

Conclusions

2019 ◽  
pp. 155-157
Author(s):  
Nguyen Van Toan ◽  
Takahito Ono

Capacitive Silicon Resonators with Piezoresistive Heat Engines

2019 ◽  
pp. 141-154
Author(s):  
Nguyen Van Toan ◽  
Takahito Ono
Keyword(s):  
Heat Engines ◽  
Silicon Resonators

Capacitive Silicon Resonators with Movable Electrode Structures

2019 ◽  
pp. 125-140
Author(s):  
Nguyen Van Toan ◽  
Takahito Ono
Keyword(s):  
Movable Electrode ◽  
Silicon Resonators

Capacitive Silicon Nanomechanical Resonators with Selective Vibration of High-Order Mode

2019 ◽  
pp. 115-124
Author(s):  
Nguyen Van Toan ◽  
Takahito Ono
Keyword(s):  
High Order Mode ◽  
High Order ◽  
Order Mode ◽  
Nanomechanical Resonators
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