Mechanically Coupled Capacitive Nanomechanical Silicon Resonators

2019 ◽  
pp. 101-114
Author(s):  
Nguyen Van Toan ◽  
Takahito Ono
Keyword(s):  
Silicon Resonators

Optothermal drive of silicon resonators: The influence of surface coatings

1990 ◽  
Vol 21 (1-3) ◽  
pp. 387-390 ◽  
Author(s):  
R.J. Pitcher ◽  
K.W.H. Foulds ◽  
J.A. Clements ◽  
J.M. Naden
Keyword(s):  
Surface Coatings ◽  
Silicon Resonators

High rejection, tunable parallel resonance in micromachined lead zirconate titanate on silicon resonators

2011 ◽  
Vol 99 (10) ◽  
pp. 103509 ◽  
Author(s):  
Sarah S. Bedair ◽  
Daniel Judy ◽  
Jeffrey Pulskamp ◽  
Ronald G. Polcawich ◽  
Adam Gillon ◽  
...  
Keyword(s):  
Lead Zirconate Titanate ◽  
Lead Zirconate ◽  
Zirconate Titanate ◽  
Silicon Resonators ◽  
Parallel Resonance ◽  
High Rejection

scholarly journals Low Temperature Sub-micron Gap Thin-film Silicon Resonators on Glass Substrate

2014 ◽  
Vol 87 ◽  
pp. 1418-1421
Author(s):  
J. Mouro ◽  
A. Gualdino ◽  
L. Teagno ◽  
V. Chu ◽  
J.P. Conde
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Glass Substrate ◽  
Thin Film Silicon ◽  
Silicon Resonators

Thermally Actuated Silicon Resonators

2012 ◽  
pp. 2712-2723
Author(s):  
Nezih Pala ◽  
Ahmad Nabil Abbas ◽  
Carsten Rockstuhl ◽  
Christoph Menzel ◽  
Stefan Mühlig ◽  
...  
Keyword(s):  
Silicon Resonators ◽  
Thermally Actuated

Porous Silicon Resonators for Improved Vapor Detection

2012 ◽  
Vol 21 (1) ◽  
pp. 235-242 ◽  
Author(s):  
Yongha Hwang ◽  
Feng Gao ◽  
Augustin J. Hong ◽  
Rob N. Candler
Keyword(s):  
Porous Silicon ◽  
Vapor Detection ◽  
Silicon Resonators

Enhanced Photocatalytic Activity of Highly Crystallized and Ordered Mesoporous Titanium Oxide Measured by Silicon Resonators

2010 ◽  
Vol 82 (7) ◽  
pp. 3032-3037 ◽  
Author(s):  
Jinmyoung Joo ◽  
Jongmin Shim ◽  
Hyejung Seo ◽  
Namchul Jung ◽  
Ulrich Wiesner ◽  
...  
Keyword(s):  
Photocatalytic Activity ◽  
Titanium Oxide ◽  
Ordered Mesoporous ◽  
Silicon Resonators

Temperature-compensated high-stability silicon resonators

2007 ◽  
Vol 90 (24) ◽  
pp. 244107 ◽  
Author(s):  
Renata Melamud ◽  
Bongsang Kim ◽  
Saurabh A. Chandorkar ◽  
Matthew A. Hopcroft ◽  
Manu Agarwal ◽  
...  
Keyword(s):  
High Stability ◽  
Silicon Resonators
Sign in / Sign up

Export Citation Format

Share Document