Hermetically Packaged Capacitive Silicon Resonators on LTCC Substrate

2019 ◽  
pp. 40-55
Author(s):  
Nguyen Van Toan ◽  
Takahito Ono
Keyword(s):  
Silicon Resonators ◽  
Ltcc Substrate

Effects of Key Process Conditions on Warpage and Via Protrusion of LTCC Substrate

2008 ◽  
Vol 23 (2) ◽  
pp. 182-187 ◽  
Author(s):  
Z. W. Zhong ◽  
P. Arulvanan ◽  
C. K. Goh
Keyword(s):  
Process Conditions ◽  
Ltcc Substrate

Optothermal drive of silicon resonators: The influence of surface coatings

1990 ◽  
Vol 21 (1-3) ◽  
pp. 387-390 ◽  
Author(s):  
R.J. Pitcher ◽  
K.W.H. Foulds ◽  
J.A. Clements ◽  
J.M. Naden
Keyword(s):  
Surface Coatings ◽  
Silicon Resonators

High rejection, tunable parallel resonance in micromachined lead zirconate titanate on silicon resonators

2011 ◽  
Vol 99 (10) ◽  
pp. 103509 ◽  
Author(s):  
Sarah S. Bedair ◽  
Daniel Judy ◽  
Jeffrey Pulskamp ◽  
Ronald G. Polcawich ◽  
Adam Gillon ◽  
...  
Keyword(s):  
Lead Zirconate Titanate ◽  
Lead Zirconate ◽  
Zirconate Titanate ◽  
Silicon Resonators ◽  
Parallel Resonance ◽  
High Rejection

Benefits of the LTCC Substrate Configuration with an Air-Gap for Realization of RF Inductor with High Q-Factor and SRF

2012 ◽  
Vol 9 (1) ◽  
pp. 1-10 ◽  
Author(s):  
Goran J. Radosavljević ◽  
Andrea M. Marić ◽  
Walter Smetana ◽  
Ljiljana D. Živanov
Keyword(s):  
Air Gap ◽  
Q Factor ◽  
High Q ◽  
Rf Inductor ◽  
Ltcc Substrate

scholarly journals Low Temperature Sub-micron Gap Thin-film Silicon Resonators on Glass Substrate

2014 ◽  
Vol 87 ◽  
pp. 1418-1421
Author(s):  
J. Mouro ◽  
A. Gualdino ◽  
L. Teagno ◽  
V. Chu ◽  
J.P. Conde
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Glass Substrate ◽  
Thin Film Silicon ◽  
Silicon Resonators
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