Optical Inspection of Microsystems
Latest Publications

TOTAL DOCUMENTS

14

(FIVE YEARS 0)

H-INDEX

0

(FIVE YEARS 0)

Published By CRC Press

9781315221250

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Light Scattering Techniques for the Inspection of Microcomponents and Microstructures

Optical Inspection of Microsystems ◽

10.1201/9781420019162-7 ◽

2018 ◽

pp. 121-138

Keyword(s):

Light Scattering

Download Full-text

Spectroscopic Techniques for MEMS Inspection

Optical Inspection of Microsystems ◽

10.1201/9781420019162-18 ◽

2018 ◽

pp. 477-500

Keyword(s):

Spectroscopic Techniques

Download Full-text

Measuring MEMS in Motion by Laser Doppler Vibrometry

Optical Inspection of Microsystems ◽

10.1201/9781420019162-13 ◽

2018 ◽

pp. 263-310

Keyword(s):

Laser Doppler ◽

Laser Doppler Vibrometry

Download Full-text

Interference Microscopy Techniques for Microsystem Characterization

Optical Inspection of Microsystems ◽

10.1201/9781420019162-12 ◽

2018 ◽

pp. 235-262

Keyword(s):

Interference Microscopy ◽

Microscopy Techniques

Download Full-text

Characterization and Measurement of Microcomponents with the Atomic Force Microscope (AFM)

Optical Inspection of Microsystems ◽

10.1201/9781420019162-8 ◽

2018 ◽

pp. 139-162

Keyword(s):

Atomic Force Microscope ◽

Download Full-text

Digital Holography and Its Application in MEMS/MOEMS Inspection

Optical Inspection of Microsystems ◽

10.1201/9781420019162-16 ◽

2018 ◽

pp. 369-444

Keyword(s):

Digital Holography

Download Full-text

Image Correlation Techniques for Microsystems Inspection

Optical Inspection of Microsystems ◽

10.1201/9781420019162-6 ◽

2018 ◽

pp. 73-120

Keyword(s):

Image Correlation ◽

Correlation Techniques

Download Full-text

Speckle Metrology for Microsystem Inspection

Optical Inspection of Microsystems ◽

10.1201/9781420019162-17 ◽

2018 ◽

pp. 445-476

Keyword(s):

Speckle Metrology

Download Full-text

Optoelectronic Holography for Testing Electronic Packaging and MEMS

Optical Inspection of Microsystems ◽

10.1201/9781420019162-15 ◽

2018 ◽

pp. 343-368

Keyword(s):

Electronic Packaging

Download Full-text

An Interferometric Platform for Static, Quasi-Static, and Dynamic Evaluation of Out-of-Plane Deformations of MEMS and MOEMS

Optical Inspection of Microsystems ◽

10.1201/9781420019162-14 ◽

2018 ◽

pp. 311-342

Keyword(s):

Dynamic Evaluation ◽

Out Of Plane ◽

Plane Deformations

Download Full-text