Reliability of MEMS - Advanced Micro and Nanosystems
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12

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2

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Published By Wiley

9783527314942, 9783527622139

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Thin‐Film Characterization Using the Bulge Test

Reliability of MEMS - Advanced Micro and Nanosystems ◽

10.1002/9783527622139.ch3 ◽

2007 ◽

pp. 67-121 ◽

Author(s):

Oliver Paul ◽

Joao Gaspar

Keyword(s):

Thin Film ◽

Thin Film Characterization

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Reliability of a Capacitive Pressure Sensor

Reliability of MEMS - Advanced Micro and Nanosystems ◽

10.1002/9783527622139.ch6 ◽

2007 ◽

pp. 185-203

Author(s):

Fumihiko Sato ◽

Hideaki Watanabe ◽

Sho Sasaki

Keyword(s):

Pressure Sensor ◽

Capacitive Pressure Sensor

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Elastoplastic Indentation Contact Mechanics of Homogeneous Materials and Coating–Substrate Systems

Reliability of MEMS - Advanced Micro and Nanosystems ◽

10.1002/9783527622139.ch2 ◽

2007 ◽

pp. 27-65 ◽

Author(s):

Mototsugu Sakai

Keyword(s):

Contact Mechanics ◽

Homogeneous Materials

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Uniaxial Tensile Test for MEMS Materials

Reliability of MEMS - Advanced Micro and Nanosystems ◽

10.1002/9783527622139.ch4 ◽

2007 ◽

pp. 123-161

Author(s):

Takahiro Namazu

Keyword(s):

Tensile Test ◽

Uniaxial Tensile ◽

Uniaxial Tensile Test

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Eco Scan MEMS Resonant Mirror

Reliability of MEMS - Advanced Micro and Nanosystems ◽

10.1002/9783527622139.ch10 ◽

2007 ◽

pp. 267-290

Author(s):

Yuzuru Ueda ◽

Akira Yamazaki

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Front Matter

Reliability of MEMS - Advanced Micro and Nanosystems ◽

10.1002/9783527622139.fmatter ◽

2007 ◽

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High‐Accuracy, High‐Reliability MEMS Accelerometer

Reliability of MEMS - Advanced Micro and Nanosystems ◽

10.1002/9783527622139.ch8 ◽

2007 ◽

pp. 225-237

Author(s):

Noriyuki Yasuike

Keyword(s):

High Reliability ◽

High Accuracy ◽

Mems Accelerometer

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Evaluation of Mechanical Properties of MEMS Materials and Their Standardization

Reliability of MEMS - Advanced Micro and Nanosystems ◽

10.1002/9783527622139.ch1 ◽

2007 ◽

pp. 1-25 ◽

Author(s):

Toshiyuki Tsuchiya

Keyword(s):

Mechanical Properties

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Inertial Sensors

Reliability of MEMS - Advanced Micro and Nanosystems ◽

10.1002/9783527622139.ch7 ◽

2007 ◽

pp. 205-223

Author(s):

Osamu Torayashiki ◽

Kenji Komaki

Keyword(s):

Inertial Sensors

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Index

Reliability of MEMS - Advanced Micro and Nanosystems ◽

10.1002/9783527622139.index ◽

2007 ◽

pp. 291-303

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