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2018 IEEE International Interconnect Technology Conference (IITC)
Latest Publications
TOTAL DOCUMENTS
68
(FIVE YEARS 0)
H-INDEX
5
(FIVE YEARS 0)
Published By IEEE
9781538643372
Latest Documents
Most Cited Documents
Contributed Authors
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Related Keywords
Latest Documents
Most Cited Documents
Contributed Authors
Related Sources
Related Keywords
Modeling Wafer Bending Effects on RDL Layer Reliability in a Multiple Die Package
2018 IEEE International Interconnect Technology Conference (IITC)
◽
10.1109/iitc.2018.8430421
◽
2018
◽
Cited By ~ 1
Author(s):
Tzu Chen Wang
◽
Chih Chieh Yeh
◽
Xiaopeng Xu
◽
Karim EI Sayed
◽
Chun-Hung Steven Lin
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Stress Induced Densification of Thin Porous Low-K Films During Nanoindentation
2018 IEEE International Interconnect Technology Conference (IITC)
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10.1109/iitc.2018.8430466
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2018
◽
Author(s):
O. O. Okudur
◽
M. Rcdzheb
◽
K. Vanstreels
◽
H. Zahcdnamesh
◽
M. Gonzalez
◽
...
Keyword(s):
Low K
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Quantum Computing and the Importance of Interconnects
2018 IEEE International Interconnect Technology Conference (IITC)
◽
10.1109/iitc.2018.8430479
◽
2018
◽
Author(s):
James S. Clarke
Keyword(s):
Quantum Computing
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Silicide Based Low Temperature and Low Pressure Bonding of TI/SI for Microfludic and Hermetic Selaling Application
2018 IEEE International Interconnect Technology Conference (IITC)
◽
10.1109/iitc.2018.8430450
◽
2018
◽
Author(s):
C Hemanth Kumar
◽
Asisa Kumar Pnaigrahi
◽
Nirupam Paul
◽
Satish Bonam
◽
Siva Rama Krishna Vanjari
◽
...
Keyword(s):
Low Temperature
◽
Low Pressure
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Replacement Metal Contact Using Sacrificial ILD0 for Wrap Around Contact in Scaled FinFET Technology
2018 IEEE International Interconnect Technology Conference (IITC)
◽
10.1109/iitc.2018.8430457
◽
2018
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Author(s):
S-A. Chew
◽
S. Demuynck
◽
L. Zhang
◽
A. Pacco
◽
K. Devriendt
◽
...
Keyword(s):
Metal Contact
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Modulation of Within-Wafer and Within-die Topography for Damascene Copper in Advanced Technology
2018 IEEE International Interconnect Technology Conference (IITC)
◽
10.1109/iitc.2018.8430416
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2018
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Author(s):
Wei-Tsu Tseng
◽
Tien-Jen Cheng
◽
Shafaat Ahmed
◽
Jusang Lee
◽
Frieder Baumann
Keyword(s):
Advanced Technology
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An Innovative System Integration Interconnection Technology Beyond BEOL
2018 IEEE International Interconnect Technology Conference (IITC)
◽
10.1109/iitc.2018.8430422
◽
2018
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Author(s):
Dyi-Chung Hu
Keyword(s):
System Integration
◽
Innovative System
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Silicon Trench Etch Uniformity Improvement for Microloading and Macro-to-Macro Loading for sub-14nmNode
2018 IEEE International Interconnect Technology Conference (IITC)
◽
10.1109/iitc.2018.8430443
◽
2018
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Author(s):
Yong Mo Yang
◽
Sang Woo Lim
◽
Junsic Hong
◽
Mira Park
◽
Yinxiao Yang
◽
...
Download Full-text
PVD- Treated ALD TaN for Cu Interconnect Extension to 5nm Node and Beyond
2018 IEEE International Interconnect Technology Conference (IITC)
◽
10.1109/iitc.2018.8430433
◽
2018
◽
Cited By ~ 3
Author(s):
Zhiyuan Wu
◽
Rui Li
◽
Xiangjin Xie
◽
Wesley Suen
◽
Jennifer Tseng
◽
...
Keyword(s):
Cu Interconnect
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From Direct Bonding Mechanism to 3D Applications
2018 IEEE International Interconnect Technology Conference (IITC)
◽
10.1109/iitc.2018.8430293
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2018
◽
Cited By ~ 2
Author(s):
F. Fournel
◽
H. Moriceau
◽
V. Larrey
◽
C. Morales
◽
C. Mauguen
◽
...
Keyword(s):
Bonding Mechanism
◽
3D Applications
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