An Innovative System Integration Interconnection Technology Beyond BEOL

Author(s):  
Dyi-Chung Hu
2000 ◽  
Vol 10 (01) ◽  
pp. 205-215 ◽  
Author(s):  
TADAO NAGATSUMA ◽  
KATSUYUKI MACHIDA ◽  
HIROMU ISHII ◽  
NABIL SAHRI ◽  
MITSURU SHINAGAWA ◽  
...  

This paper describes an innovative system integration scheme wherein heterogeneous materials and devices, including photonic devices as well as electronics, are organically integrated on silicon-core circuitry to achieve better performance, higher functionality and lower cost. First, some general integration technology trends in semiconductor electronics are described. Then, after a discussion of new heterogeneous integration schemes based on silicon-core technologies, recent attempts and applications are shown such as low power LSIs, sensors and micromachine switches on silicon and milimeter-wave photonics.


Author(s):  
Peter Schneider ◽  
Sven Reitz ◽  
Joern Stolle ◽  
Roland Martin ◽  
Andreas Wilde ◽  
...  

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