Surface Metrology for Micro- and Nanofabrication
Latest Publications

TOTAL DOCUMENTS

(FIVE YEARS 18)

H-INDEX

(FIVE YEARS 0)

Published By Elsevier

9780128178508

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Dedication

Surface Metrology for Micro- and Nanofabrication ◽

10.1016/b978-0-12-817850-8.00017-0 ◽

2021 ◽

pp. v

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Copyright

Surface Metrology for Micro- and Nanofabrication ◽

10.1016/b978-0-12-817850-8.00014-5 ◽

2021 ◽

pp. iv

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In-process fast tool servo profiler

Surface Metrology for Micro- and Nanofabrication ◽

10.1016/b978-0-12-817850-8.00011-x ◽

2021 ◽

pp. 371-403

Author(s):

Wei Gao

Keyword(s):

Fast Tool Servo

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On-machine atomic force microscope

Surface Metrology for Micro- and Nanofabrication ◽

10.1016/b978-0-12-817850-8.00009-1 ◽

2021 ◽

pp. 305-336

Author(s):

Wei Gao

Keyword(s):

Atomic Force Microscope ◽

Atomic Force

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On-machine air-bearing surface profiler

Surface Metrology for Micro- and Nanofabrication ◽

10.1016/b978-0-12-817850-8.00008-x ◽

2021 ◽

pp. 271-304

Author(s):

Wei Gao

Keyword(s):

Air Bearing ◽

Bearing Surface

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Low-force elastic beam surface profiler

Surface Metrology for Micro- and Nanofabrication ◽

10.1016/b978-0-12-817850-8.00004-2 ◽

2021 ◽

pp. 121-154

Author(s):

Wei Gao

Keyword(s):

Elastic Beam ◽

Beam Surface

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Noncontact scanning electrostatic force microscope

Surface Metrology for Micro- and Nanofabrication ◽

10.1016/b978-0-12-817850-8.00001-7 ◽

2021 ◽

pp. 1-39

Author(s):

Wei Gao

Keyword(s):

Electrostatic Force

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Surface Metrology for Micro- and Nanofabrication ◽

10.1016/b978-0-12-817850-8.00015-7 ◽

2021 ◽

pp. vii-x

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On-machine length gauge surface profiler

Surface Metrology for Micro- and Nanofabrication ◽

10.1016/b978-0-12-817850-8.00007-8 ◽

2021 ◽

pp. 225-269

Author(s):

Wei Gao

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Index

Surface Metrology for Micro- and Nanofabrication ◽

10.1016/b978-0-12-817850-8.00018-2 ◽

2021 ◽

pp. 429-438

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Surface Metrology for Micro- and Nanofabrication
Latest Publications

TOTAL DOCUMENTS

H-INDEX

Published By Elsevier

Dedication

Copyright

In-process fast tool servo profiler

On-machine atomic force microscope

On-machine air-bearing surface profiler

Low-force elastic beam surface profiler

Noncontact scanning electrostatic force microscope

Contents

On-machine length gauge surface profiler

Index

Export Citation Format

Surface Metrology for Micro- and NanofabricationLatest Publications

TOTAL DOCUMENTS

H-INDEX

Published By Elsevier

Dedication

Copyright

In-process fast tool servo profiler

On-machine atomic force microscope

On-machine air-bearing surface profiler

Low-force elastic beam surface profiler

Noncontact scanning electrostatic force microscope

Contents

On-machine length gauge surface profiler

Index

Surface Metrology for Micro- and Nanofabrication
Latest Publications