On-machine air-bearing surface profiler

Author(s):  
Wei Gao
Keyword(s):  
2002 ◽  
Vol 16 (8) ◽  
pp. 1102-1108 ◽  
Author(s):  
Sang-Joon Yoon ◽  
Min-Soo Kim ◽  
Dong-Hoon Choi

1997 ◽  
Vol 119 (3) ◽  
pp. 388-392
Author(s):  
J. M. Pitarresi ◽  
K. A. Haller

Air layer supported bearing pads, or “air bearings” as they are commonly called, are popular because of their high load capacity and low in-plane coefficient of friction, making them well suited for supporting moving, high accuracy manufacturing stages. Air/vacuum bearings enhance these capabilities by giving the bearing pad load resistance capacity in both the upward and downward directions. Consequently, it is desirable to know how to model the air layer between the bearing pad and the bearing surface. In this paper, a simple finite element modeling approach is presented for investigating the vibrational characteristics of an air layer supported bearing. It was found that by modeling the air layer as a bed of uniform springs who’s stiffness is determined by load-displacement tests of the bearing, a reasonable representation of the response can be obtained. For a bearing supported by air without vacuum, the dynamic response was very similar to that of a freely supported bearing. The addition of vacuum to an air bearing was found to significantly lower its fundamental frequency which could lead to unwanted resonance problems.


Author(s):  
Sang-Joon Yoon ◽  
Dong-Hoon Choi

The focus in this paper is to automatically design the air-bearing surface (ABS) considering the randomness of its geometry as an uncertainty of design variables. Designs determined by the conventional optimization could only provide a low level of confidence in practical products due to the existence of uncertainties in either engineering simulations or manufacturing processes. This calls for a reliability-based approach to the design optimization, which increases product or process quality by addressing randomness or stochastic properties of design problems. In this study, a probabilistic design problem is formulated considering the reliability analysis which is employed to estimate how the fabrication tolerances of individual slider parameters affect the final flying attitude tolerances. The proposed approach first solves the deterministic optimization problem. Beginning with this solution, the reliability-based design optimization (RBDO) is continued with the probabilistic constraints affected by the random variables. Probabilistic constraints overriding the constraints of the deterministic optimization attempt to drive the design to a reliability solution with minimum increase in the objective. The simulation results of the probabilistic design are directly compared with the values of the initial design and the results of the deterministic optimum design, respectively. In order to show the effectiveness of the proposed approach, the reliability analyses by the Monte Carlo simulation are carried out. And the results demonstrate how efficient the proposed approach is, considering the enormous computation time of the reliability analysis.


1994 ◽  
Vol 75 (10) ◽  
pp. 6394-6396 ◽  
Author(s):  
X. Shi ◽  
F. H. Liu ◽  
Yuet Li ◽  
M. H. Kryder

Author(s):  
Kenji SUZUKI ◽  
Takayuki AKIMATSU ◽  
Kenji SASAKI ◽  
Masayuki KURITA
Keyword(s):  

2009 ◽  
Vol 2009 ◽  
pp. 1-10 ◽  
Author(s):  
Ching Shen

The precise knowledge of the force and moment generated by the air squeezed under the read-write slider by the rotating disc is an engineering necessity in designing the air bearing surface slider. This paper reviews methods addressing the thin gas film bearings problem. It firstly reviews briefly the relatively well-known two methods of calculations of the microgas flows under flying head sliders, the generalized Reynolds equation, having given a number of useful results of slider design, and the DSMC method, which is precise and appropriate for the flow of complex configurations but is restricted to miniature (~micrometer) size sliders. The main purpose of the paper is to introduce to the reader an alternative method, the information preservation (IP) method, for use in simulation of the flows under air bearing surfaces. Some recent results of IP simulation of slider flows published on conference proceedings are introduced here.


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