Digest of Papers Microprocesses and Nanotechnology 2005
Latest Publications

TOTAL DOCUMENTS

155
(FIVE YEARS 0)

H-INDEX

2
(FIVE YEARS 0)

Published By IEEE

4990247221
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

A new fabrication technology of FinFETs using a neutral beam etching

2005 ◽  
Author(s):  
K. Endo ◽  
S. Noda ◽  
T. Ozaki ◽  
S. Samukawa ◽  
M. Masahara ◽  
...  
Keyword(s):  
Neutral Beam ◽  
Fabrication Technology ◽  
Neutral Beam Etching

Defect control of immersion lithography with top coat material

2005 ◽  
Author(s):  
T. Ando ◽  
T. Takayama ◽  
H. Tsuji ◽  
K. Ishizuka ◽  
M. Yoshida ◽  
...  
Keyword(s):  
Immersion Lithography ◽  
Defect Control ◽  
Coat Material

Fabrication of multi-layered structure by advanced reversal imprints lithography

2005 ◽  
Author(s):  
M. Nishihata ◽  
K. Okuda ◽  
T. Aoyama ◽  
T. Yoshikawa ◽  
Y. Hirai
Keyword(s):  
Layered Structure

Low pressure CVD growth of single-wall carbon nanotubes

2005 ◽  
Author(s):  
T. Shiokawa ◽  
B.P. Zhang ◽  
M. Suzuki ◽  
T. Kobayashi ◽  
K. Ishibashi
Keyword(s):  
Carbon Nanotubes ◽  
Low Pressure ◽  
Single Wall Carbon Nanotubes ◽  
Single Wall Carbon ◽  
Cvd Growth

Fabrication of a three-dimensional multichamber using polymer bonding and MEMS technology

2005 ◽  
Author(s):  
Duk-Soo Eun ◽  
Hyung-Jin Park ◽  
Dae-Young Kong ◽  
Seong-Ho Kong ◽  
Pyung Choi ◽  
...  
Keyword(s):  
Three Dimensional ◽  
Mems Technology
Load More ...
Sign in / Sign up

Export Citation Format

Share Document