Digest of Papers Microprocesses and Nanotechnology 2005
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155
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4990247221
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

A new EUV irradiation and multilayer evaluation system for EUVL mirror contamination in NewSUBARU

2005 ◽  
Author(s):  
M. Niibe ◽  
Y. Kakutani ◽  
S. Terashima ◽  
H. Takase ◽  
Y. Gomei ◽  
...  
Keyword(s):  
Evaluation System

Fabrication of a three-dimensional multichamber using polymer bonding and MEMS technology

2005 ◽  
Author(s):  
Duk-Soo Eun ◽  
Hyung-Jin Park ◽  
Dae-Young Kong ◽  
Seong-Ho Kong ◽  
Pyung Choi ◽  
...  
Keyword(s):  
Three Dimensional ◽  
Mems Technology

A new fabrication technology of FinFETs using a neutral beam etching

2005 ◽  
Author(s):  
K. Endo ◽  
S. Noda ◽  
T. Ozaki ◽  
S. Samukawa ◽  
M. Masahara ◽  
...  
Keyword(s):  
Neutral Beam ◽  
Fabrication Technology ◽  
Neutral Beam Etching

Defect control of immersion lithography with top coat material

2005 ◽  
Author(s):  
T. Ando ◽  
T. Takayama ◽  
H. Tsuji ◽  
K. Ishizuka ◽  
M. Yoshida ◽  
...  
Keyword(s):  
Immersion Lithography ◽  
Defect Control ◽  
Coat Material
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