2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
Latest Publications

TOTAL DOCUMENTS

94

(FIVE YEARS 0)

H-INDEX

5

(FIVE YEARS 0)

Published By IEEE

9781509002702

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Optimized circuit design and novel Al deposition process cure power short failure caused by Al whisker

2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) ◽

10.1109/asmc.2016.7491162 ◽

2016 ◽

Author(s):

Y. W. Ma ◽

Chien Hsin Lai ◽

Zhi Min Zhang ◽

Wei Liang Huang ◽

Chao Yong Li ◽

...

Keyword(s):

Circuit Design ◽

Deposition Process

Download Full-text

Impact of FOUP environment on product yield in advanced technologies

2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) ◽

10.1109/asmc.2016.7491118 ◽

2016 ◽

Author(s):

Sara Case ◽

Stephanie Waite ◽

John Barker ◽

Wei Zhao ◽

Jong Soo Kim ◽

...

Keyword(s):

Product Yield ◽

Advanced Technologies

Download Full-text

Logic characterization vehicle design for yield learning

2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) ◽

10.1109/asmc.2016.7491080 ◽

2016 ◽

Author(s):

Ben Niewenhuis ◽

Zeye Dexter Liu ◽

Soumya Mittal ◽

R. D. Shawn Blanton

Keyword(s):

Vehicle Design ◽

Yield Learning ◽

Design For Yield

Download Full-text

Detecting and preventing gate oxide plasma damage during PECVD carbon deposition through surface photovoltage measurements

2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) ◽

10.1109/asmc.2016.7491161 ◽

2016 ◽

Author(s):

Alan K. Fritz ◽

Leonard J. Olmer

Keyword(s):

Carbon Deposition ◽

Surface Photovoltage ◽

Download Full-text

A case study on inline defect diagnosis by applying e-beam inspection system

2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) ◽

10.1109/asmc.2016.7491151 ◽

2016 ◽

Author(s):

Hao-Yu Chien ◽

Chan-Hao Hsu ◽

Yue-Ying Yen ◽

Tzung-Hua Ying

Keyword(s):

Inspection System ◽

Defect Diagnosis

Download Full-text

Novel methods for SPC defect monitoring: Normalizable diversity sampling: Defect inspection

2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) ◽

10.1109/asmc.2016.7491108 ◽

2016 ◽

Author(s):

Ian Tolle ◽

Ankit Jain ◽

Martin Plihal ◽

Sumanth Kini

Keyword(s):

Defect Inspection ◽

Diversity Sampling ◽

Download Full-text

Management of crisis situations in a large unified AMHS of a semiconductor manufacturing facility: IE: Industrial engineering

2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) ◽

10.1109/asmc.2016.7491112 ◽

2016 ◽

Author(s):

Moulaye Aidara Ndiaye ◽

Stephane Dauzere-Peres ◽

Claude Yugma ◽

Lionel Rulliere ◽

Gilles Lamiable

Keyword(s):

Semiconductor Manufacturing ◽

Industrial Engineering ◽

Manufacturing Facility ◽

Crisis Situations

Download Full-text

Wait-time-waste improvement opportunities and ‘smart manufacturing’ in legacy 200mm fabs

2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) ◽

10.1109/asmc.2016.7491092 ◽

2016 ◽

Author(s):

Jan Driessen ◽

Rene Sjardijn ◽

Frank van Heukelom ◽

Corstian van Roest ◽

Martijn Mom

Keyword(s):

Wait Time ◽

Smart Manufacturing

Download Full-text

Detection and classification of gate to S/D shorts using charge dynamics

2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) ◽

10.1109/asmc.2016.7491153 ◽

2016 ◽

Author(s):

Ming Lei ◽

Kevin Wu ◽

Qing Tian ◽

Yan Zhao

Keyword(s):

Charge Dynamics

Download Full-text

Visible and nonvisible defects in 3DIC flows

2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) ◽

10.1109/asmc.2016.7491141 ◽

2016 ◽

Author(s):

Jacob Orbon

Download Full-text