2020 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)
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New High Efficiency Heater Design for a 3-axis CMOS MEMS Convective Accelerometer

2020 ◽  
Author(s):  
Sonia Abdellatif ◽  
Brahim Mezghani ◽  
Frederick Mailly ◽  
Pascal Nouet
Keyword(s):  
High Efficiency ◽  
Cmos Mems ◽  
Convective Accelerometer ◽  
Heater Design

Preparation of Germanium-on-insulator (GOI) wafers by means of layer transfer tehnique

2020 ◽  
Author(s):  
Marco Lisker ◽  
Andreas Kruger ◽  
Patrick Kruger ◽  
Thomas Voss ◽  
Rasuole Lukose ◽  
...  
Keyword(s):  
Layer Transfer

scholarly journals Stretchable Strain Sensors for Human Movement Monitoring

2020 ◽  
Author(s):  
Abhishek Singh Dahiya ◽  
Thierry Gil ◽  
Nadine Azemard ◽  
Jerome Thireau ◽  
Alain Lacampagne ◽  
...  
Keyword(s):  
Human Movement ◽  
Strain Sensors ◽  
Movement Monitoring

Mechanical comparison between two titanium micro membranes for in vivo pressure monitoring

2020 ◽  
Author(s):  
G. Becan ◽  
J. Phung ◽  
H. Philippe ◽  
A. Bosseboeuf ◽  
P. Coste ◽  
...  
Keyword(s):  
Pressure Monitoring

Vibrational Energy Harvester with Electric Double Layer Electrets

2020 ◽  
Author(s):  
Shimpei Ono ◽  
Kazumoto Miwa ◽  
Sunao Shimizu ◽  
Yuichiro Watanabe ◽  
Alexander Wei
Keyword(s):  
Double Layer ◽  
Electric Double Layer ◽  
Energy Harvester ◽  
Vibrational Energy

Micro-scale Electrostatic Attach-detach Device for Self-reconfigurable Modular Robotic System

2020 ◽  
Author(s):  
Kei Misumi ◽  
Gwenn Ulliac ◽  
Naoto Usami ◽  
Benoit Piranda ◽  
Yoshio Mita ◽  
...  
Keyword(s):  
Robotic System ◽  
Micro Scale

High Speed Silicon Wet Bulk Micromachining of Si{111} in KOH Based Solution

2020 ◽  
Author(s):  
Avvaru Venkata Narasimha Rao ◽  
Prem Pal ◽  
Ashok Kumar Pandey ◽  
P Krishna Menon ◽  
Hiroshi Tanaka ◽  
...  
Keyword(s):  
High Speed

Resonant micro-mirror oscillation amplitude measurement and all digital actuation

2020 ◽  
Author(s):  
Barnaby Portelli ◽  
Ivan Grech ◽  
Joseph Micallef ◽  
Russell Farrugia ◽  
Owen Casha ◽  
...  
Keyword(s):  
Oscillation Amplitude ◽  
Amplitude Measurement
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