Springer Series in Advanced Manufacturing - Precision Nanometrology
Latest Publications

TOTAL DOCUMENTS

10

(FIVE YEARS 0)

H-INDEX

2

(FIVE YEARS 0)

Published By Springer London

9781849962537, 9781849962544

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Scanning Micro-stylus System for Measurement of Micro-aspherics

Springer Series in Advanced Manufacturing - Precision Nanometrology ◽

10.1007/978-1-84996-254-4_7 ◽

2010 ◽

pp. 211-243 ◽

Cited By ~ 2

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Scanning Image-sensor System for Measurement of Micro-dimensions

Springer Series in Advanced Manufacturing - Precision Nanometrology ◽

10.1007/978-1-84996-254-4_10 ◽

2010 ◽

pp. 321-351

Keyword(s):

Image Sensor ◽

Sensor System

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Scanning Error Separation System for Measurement of Straightness

Springer Series in Advanced Manufacturing - Precision Nanometrology ◽

10.1007/978-1-84996-254-4_6 ◽

2010 ◽

pp. 175-210

Keyword(s):

Separation System ◽

Error Separation

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Surface Encoder for Measurement of In-plane Motion

Springer Series in Advanced Manufacturing - Precision Nanometrology ◽

10.1007/978-1-84996-254-4_3 ◽

2010 ◽

pp. 69-108

Keyword(s):

Plane Motion

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Large Area Scanning Probe Microscope for Micro-textured Surfaces

Springer Series in Advanced Manufacturing - Precision Nanometrology ◽

10.1007/978-1-84996-254-4_8 ◽

2010 ◽

pp. 245-281 ◽

Cited By ~ 3

Keyword(s):

Scanning Probe Microscope ◽

Scanning Probe ◽

Textured Surfaces ◽

Large Area ◽

Probe Microscope

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Grating Encoder for Measurement of In-plane and Out-of-plane Motion

Springer Series in Advanced Manufacturing - Precision Nanometrology ◽

10.1007/978-1-84996-254-4_4 ◽

2010 ◽

pp. 109-141 ◽

Cited By ~ 1

Keyword(s):

Plane Motion ◽

Out Of Plane

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Automatic Alignment Scanning Probe Microscope System for Measurement of 3D Nanostructures

Springer Series in Advanced Manufacturing - Precision Nanometrology ◽

10.1007/978-1-84996-254-4_9 ◽

2010 ◽

pp. 283-319

Keyword(s):

Scanning Probe Microscope ◽

Scanning Probe ◽

3D Nanostructures ◽

Automatic Alignment ◽

Probe Microscope

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Angle Sensor for Measurement of Surface Slope and Tilt Motion

Springer Series in Advanced Manufacturing - Precision Nanometrology ◽

10.1007/978-1-84996-254-4_1 ◽

2010 ◽

pp. 1-33 ◽

Cited By ~ 1

Keyword(s):

Surface Slope ◽

Angle Sensor

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Scanning Multi-probe System for Measurement of Roundness

Springer Series in Advanced Manufacturing - Precision Nanometrology ◽

10.1007/978-1-84996-254-4_5 ◽

2010 ◽

pp. 143-173

Keyword(s):

Probe System

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Laser Autocollimator for Measurement of Multi-axis Tilt Motion

Springer Series in Advanced Manufacturing - Precision Nanometrology ◽

10.1007/978-1-84996-254-4_2 ◽

2010 ◽

pp. 35-67

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