2012 SEMI Advanced Semiconductor Manufacturing Conference
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85
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Published By IEEE

9781467303514, 9781467303507
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

In-line metrology capability for epitaxial multi-stack SiGe layers

2012 ◽  
Author(s):  
D. Le Cunff ◽  
S. Couvrat ◽  
F. Abbate

Optical metrology of thickness and indium composition of epitaxial InxGa1−xAs layers on Si substrates

2012 ◽  
Author(s):  
N. Waldron ◽  
T. Orzali ◽  
M. Caymax ◽  
N. Horiguchi ◽  
Youseung Jin ◽  
...  
Keyword(s):  
Optical Metrology ◽  
Si Substrates ◽  
Indium Composition

Identifying systematic critical features using silicon diagnosis data

2012 ◽  
Author(s):  
C. Schuermyer ◽  
S. Malik ◽  
T. Herrmann

Use of 22 nm Litho SEM non-visual defect data as a process quality indicator

2012 ◽  
Author(s):  
C. A. Boye ◽  
C. J. Penny ◽  
J. Connors ◽  
D. Boyles ◽  
C. Janicki ◽  
...  
Keyword(s):  
Quality Indicator ◽  
Process Quality ◽  
Visual Defect

The analysis of device performance on a different shallow trench isolation (STI) liner scheme

2012 ◽  
Author(s):  
Sun Jong Wang ◽  
Jun Sup Lee ◽  
Sung Hun Kim ◽  
Sung Gun Kang ◽  
Yong-han Roh
Keyword(s):  
Device Performance ◽  
Shallow Trench Isolation ◽  
Trench Isolation

Lithography challenges and solutions for MEMS/LED/ABS applications

2012 ◽  
Author(s):  
H. R. Khorram ◽  
J. Fukui ◽  
S. Hagiwara ◽  
S. Mizoroke ◽  
M. Osanai ◽  
...  

Predictive sampling approach to dynamically optimize defect density control operations

2012 ◽  
Author(s):  
M. Pfeffer ◽  
R. Oechsner ◽  
L. Pfitzner ◽  
S. Eckert ◽  
A. Hartmann ◽  
...  
Keyword(s):  
Defect Density ◽  
Density Control ◽  
Sampling Approach
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