virtual metrology Latest Research Papers

Domain-adaptive active learning for cost-effective virtual metrology modeling

Computers in Industry ◽

10.1016/j.compind.2021.103572 ◽

2022 ◽

Vol 135 ◽

pp. 103572

Author(s):

Jaewoong Shim ◽

Seokho Kang

Keyword(s):

Active Learning ◽

Cost Effective ◽

Virtual Metrology

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Virtual metrology modeling of reactive ion etching based on statistics-based and dynamics-inspired spectral features

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/6.0001277 ◽

2021 ◽

Vol 39 (6) ◽

pp. 064003

Author(s):

Kun-Chieh Chien ◽

Chih-Hao Chang ◽

Dragan Djurdjanovic

Keyword(s):

Reactive Ion Etching ◽

Spectral Features ◽

Ion Etching ◽

Virtual Metrology

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A SIA-LSTM based virtual metrology for quality variables in irregular sampled time sequence of industrial processes

Chemical Engineering Science ◽

10.1016/j.ces.2021.117299 ◽

2021 ◽

pp. 117299

Author(s):

Xiaofeng Yuan ◽

Zhenzhen Jia ◽

Lin Li ◽

Kai Wang ◽

Lingjian Ye ◽

...

Keyword(s):

Time Sequence ◽

Industrial Processes ◽

Virtual Metrology

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DBAM: Making Virtual Metrology/Soft sensing with time series data scalable through Deep Learning

Control Engineering Practice ◽

10.1016/j.conengprac.2021.104914 ◽

2021 ◽

Vol 116 ◽

pp. 104914

Author(s):

Natalie Gentner ◽

Mattia Carletti ◽

Andreas Kyek ◽

Gian Antonio Susto ◽

Yao Yang

Keyword(s):

Time Series ◽

Deep Learning ◽

Time Series Data ◽

Series Data ◽

Soft Sensing ◽

Virtual Metrology

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Virtual metrology as an approach for product quality estimation in Industry 4.0: a systematic review and integrative conceptual framework

International Journal of Production Research ◽

10.1080/00207543.2021.1976433 ◽

2021 ◽

pp. 1-24

Author(s):

Paul-Arthur Dreyfus ◽

Foivos Psarommatis ◽

Gokan May ◽

Dimitris Kiritsis

Keyword(s):

Systematic Review ◽

Conceptual Framework ◽

Product Quality ◽

Industry 4.0 ◽

Quality Estimation ◽

Virtual Metrology

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Virtual Metrology of Visualizing Copper Microstructure Featured with Computer Vision and Artificial Neural Network

10.1109/ipfa53173.2021.9617445 ◽

2021 ◽

Author(s):

Lingyen Yeh ◽

Rencheng Chen

Keyword(s):

Neural Network ◽

Computer Vision ◽

Artificial Neural Network ◽

Virtual Metrology ◽

Artificial Neural

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Virtual metrology for semiconductor manufacturing: Focus on transfer learning

10.1109/case49439.2021.9551567 ◽

2021 ◽

Author(s):

Rebecca Clain ◽

Valeria Borodin ◽

Michel Juge ◽

Agnes Roussy

Keyword(s):

Transfer Learning ◽

Semiconductor Manufacturing ◽

Virtual Metrology

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Automatic Virtual Metrology (AVM)

10.1002/9781119739920.ch8 ◽

2021 ◽

pp. 275-329

Author(s):

Fan‐Tien Cheng

Keyword(s):

Virtual Metrology

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Machine learning-based virtual metrology on film thickness in amorphous carbon layer deposition process

Measurement: Sensors ◽

10.1016/j.measen.2021.100046 ◽

2021 ◽

Vol 16 ◽

pp. 100046

Author(s):

Jeong Eun Choi ◽

Sang Jeen Hong

Keyword(s):

Machine Learning ◽

Film Thickness ◽

Amorphous Carbon ◽

Deposition Process ◽

Carbon Layer ◽

Virtual Metrology ◽

Layer Deposition ◽

Amorphous Carbon Layer

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Virtual Metrology Equipped with a Variability Analyzer in Chemical Mechanical Polishing

10.1109/iitc51362.2021.9537529 ◽

2021 ◽

Author(s):

Lingyen Yeh ◽

Shun Chun Huang

Keyword(s):

Chemical Mechanical Polishing ◽

Mechanical Polishing ◽

Virtual Metrology

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virtual metrology
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H-INDEX

Domain-adaptive active learning for cost-effective virtual metrology modeling

Virtual metrology modeling of reactive ion etching based on statistics-based and dynamics-inspired spectral features

A SIA-LSTM based virtual metrology for quality variables in irregular sampled time sequence of industrial processes

DBAM: Making Virtual Metrology/Soft sensing with time series data scalable through Deep Learning

Virtual metrology as an approach for product quality estimation in Industry 4.0: a systematic review and integrative conceptual framework

Virtual Metrology of Visualizing Copper Microstructure Featured with Computer Vision and Artificial Neural Network

Virtual metrology for semiconductor manufacturing: Focus on transfer learning

Automatic Virtual Metrology (AVM)

Machine learning-based virtual metrology on film thickness in amorphous carbon layer deposition process

Virtual Metrology Equipped with a Variability Analyzer in Chemical Mechanical Polishing

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virtual metrologyRecently Published Documents

TOTAL DOCUMENTS

H-INDEX

Domain-adaptive active learning for cost-effective virtual metrology modeling

Virtual metrology modeling of reactive ion etching based on statistics-based and dynamics-inspired spectral features

A SIA-LSTM based virtual metrology for quality variables in irregular sampled time sequence of industrial processes

DBAM: Making Virtual Metrology/Soft sensing with time series data scalable through Deep Learning

Virtual metrology as an approach for product quality estimation in Industry 4.0: a systematic review and integrative conceptual framework

Virtual Metrology of Visualizing Copper Microstructure Featured with Computer Vision and Artificial Neural Network

Virtual metrology for semiconductor manufacturing: Focus on transfer learning

Automatic Virtual Metrology (AVM)

Machine learning-based virtual metrology on film thickness in amorphous carbon layer deposition process

Virtual Metrology Equipped with a Variability Analyzer in Chemical Mechanical Polishing

virtual metrology
Recently Published Documents