Advances in Patterning Materials and Processes XXXVI
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9781510625679, 9781510625686
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

PSCAR optimization to reduce EUV resist roughness with sensitization using Resist Formulation Optimizer (RFO) (Conference Presentation)

2019 ◽  
Author(s):  
Seiji Nagahara ◽  
Cong Que Dinh ◽  
Gosuke Shiraishi ◽  
Yuya Kamei ◽  
Kathleen Nafus ◽  
...  

Oligomers of MORE: Molecular Organometallic Resists for EUV

2019 ◽  
Author(s):  
Shaheen Hasan ◽  
Michael Murphy ◽  
Maximilian Weires ◽  
Steven Grzeskowiak ◽  
Greg Denbeaux ◽  
...  

ToF-SIMS analysis of antimony carboxylate EUV photoresists

2019 ◽  
Author(s):  
Michael Murphy ◽  
Shaheen Hasan ◽  
Steven Novak ◽  
Gregory H. Denbeaux ◽  
Robert L. Brainard
Keyword(s):  
Tof Sims ◽  
Sims Analysis

Start-up performance and pattern defectivity improvement using 2nm rated nylon filter developed with lithography filtration expertise

2019 ◽  
Author(s):  
Toru Umeda ◽  
Eric Shiu ◽  
Takehito Mizuno ◽  
Hisashi Nakagawa ◽  
Tetsuya Murakami ◽  
...  
Keyword(s):  
Start Up

New silicon hard mask material development for sub-5nm node

2019 ◽  
Author(s):  
Tomoaki Seko ◽  
Tatsuya Kasai ◽  
Ryuuichi Serizawa ◽  
Satoshi Dei ◽  
Tatsuya Sakai
Keyword(s):  
Hard Mask ◽  
Material Development ◽  
Mask Material

Model studies on the metal salt sensitization of chemically amplified photoresists (Conference Presentation)

2019 ◽  
Author(s):  
Gregory M. Wallraff ◽  
Hoa D. Truong ◽  
Martha I. Sanchez ◽  
Noel Arellano ◽  
Alexander M. Friz ◽  
...  
Keyword(s):  
Metal Salt ◽  
Model Studies ◽  
Chemically Amplified

Imaging behavior of highly fluorinated molecular resists under extreme UV radiation

2019 ◽  
Author(s):  
Hyuntaek Oh ◽  
Seok-Heon Jung ◽  
Jeong-Seok Mun ◽  
Kanghyun Kim ◽  
Sangsul Lee ◽  
...  
Keyword(s):  
Uv Radiation ◽  
Extreme Uv

Improved hemicellulose spin on carbon hardmask

2019 ◽  
Author(s):  
Kazuyo Morita ◽  
Kimiko Yamamoto ◽  
Hiroki Tanaka ◽  
Yasuaki Tanaka ◽  
Masahiko Harumoto ◽  
...  
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