International Conference on Extreme Ultraviolet Lithography 2018
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9781510622135, 9781510622142
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Enabling enhanced EUV lithographic performance using advanced SMO, OPC, and RET

2019 ◽  
Author(s):  
Germain L. Fenger ◽  
Ana-Maria Armeanu ◽  
Vicky Philipsen ◽  
Fan Jiang ◽  
Neal Lafferty ◽  
...  

Benchmarking of EUV lithography line/space patterning versus immersion lithography multipatterning schemes at equivalent pitch

2018 ◽  
Author(s):  
Angelique Raley ◽  
Chris A. Mack ◽  
Eric Liu ◽  
Sophie Thibaut ◽  
Akiteru Ko
Keyword(s):  
Immersion Lithography ◽  
Euv Lithography ◽  
Line Space

Extreme ultraviolet pellicle cooling by hydrogen gas flow (Conference Presentation)

2018 ◽  
Author(s):  
Hye-Lim Lee ◽  
Sung-Gyu Lee ◽  
Jae-Hun Park ◽  
Hye-Keun Oh
Keyword(s):  
Gas Flow ◽  
Extreme Ultraviolet ◽  
Hydrogen Gas

scholarly journals Evaluation of EUV resists for 5nm technology node and beyond

2018 ◽  
Author(s):  
Zuhal Tasdemir ◽  
Iacopo Mochi ◽  
Lidia van Lent-Protasova ◽  
Marieke Meeuwissen ◽  
Rolf Custers ◽  
...  
Keyword(s):  
Technology Node

Track based techniques to improve high-resolution EUV patterning defectivity

2018 ◽  
Author(s):  
Eric Liu ◽  
Naoki Shibata ◽  
Lior Huli ◽  
Corey Lemley ◽  
Shinichiro Kawakami ◽  
...  
Keyword(s):  
High Resolution

scholarly journals Phase defect inspection on EUV masks using RESCAN

2018 ◽  
Author(s):  
Rajendran Rajeev ◽  
Sara Fernandez ◽  
Iacopo Mochi ◽  
Patrick Helfenstein ◽  
Dimitrios Kazazis ◽  
...  
Keyword(s):  
Defect Inspection
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