2007 15th International Conference on Advanced Thermal Processing of Semiconductors
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66

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4

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Published By IEEE

9781424412273, 9781424412280

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Review on Process-Induced Strain Techniques for Advanced Logic Technologies

2007 15th International Conference on Advanced Thermal Processing of Semiconductors ◽

10.1109/rtp.2007.4383814 ◽

2007 ◽

Author(s):

M. Wiatr ◽

Th. Feudel ◽

A. Wei ◽

A. Mowry ◽

R. Boschke ◽

...

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New Approaches to Ultra Shallow Junction Formation by Molecular Implantation and Millisecond Laser Spike Annealing

2007 15th International Conference on Advanced Thermal Processing of Semiconductors ◽

10.1109/rtp.2007.4383856 ◽

2007 ◽

Author(s):

Naushad Variam ◽

Alex Kontos ◽

Edwin Arevalo ◽

Christopher Hatem ◽

Shaoyin Chen ◽

...

Keyword(s):

Shallow Junction ◽

New Approaches ◽

Junction Formation ◽

Spike Annealing ◽

Millisecond Laser

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Highly Active Junctions Formed in Crystalline Silicon by Infrared Laser Annealing

2007 15th International Conference on Advanced Thermal Processing of Semiconductors ◽

10.1109/rtp.2007.4383857 ◽

2007 ◽

Author(s):

Giovanni Mannino ◽

Antonino La Magna ◽

Vittorio Privitera ◽

Jens S. Christensen ◽

Lasse Vines ◽

...

Keyword(s):

Laser Annealing ◽

Crystalline Silicon ◽

Infrared Laser ◽

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Characteristics of Silicon Oxide Gate MOS Capacitors Formed by Rapid Thermal Oxidation and Annealing

2007 15th International Conference on Advanced Thermal Processing of Semiconductors ◽

10.1109/rtp.2007.4383842 ◽

2007 ◽

Author(s):

F.A. Cavarsan ◽

A. Toma ◽

J. Godoy Fo ◽

J.A. Diniz ◽

I. Doi

Keyword(s):

Thermal Oxidation ◽

Silicon Oxide ◽

Mos Capacitors ◽

Rapid Thermal Oxidation

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Wafer Level Curing of Polymer Dielectrics with Variable Frequency Microwaves

2007 15th International Conference on Advanced Thermal Processing of Semiconductors ◽

10.1109/rtp.2007.4383838 ◽

2007 ◽

Author(s):

Robert L. Hubbard ◽

Richard S. Garard

Keyword(s):

Variable Frequency ◽

Wafer Level ◽

Polymer Dielectrics ◽

Curing Of Polymer

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Low temperature Polysilicon TFT technology for electronics on plastic

2007 15th International Conference on Advanced Thermal Processing of Semiconductors ◽

10.1109/rtp.2007.4383808 ◽

2007 ◽

Author(s):

G. Fortunato

Keyword(s):

Low Temperature ◽

Polysilicon Tft

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Investigation of Excimer Laser Annealing of Si using Photoluminescence at Room Temperature

2007 15th International Conference on Advanced Thermal Processing of Semiconductors ◽

10.1109/rtp.2007.4383854 ◽

2007 ◽

Author(s):

H. Bourdon ◽

A. Halimaoui ◽

J. Venturini ◽

F. Gonzatti ◽

D. Dutartre

Keyword(s):

Excimer Laser ◽

Room Temperature ◽

Laser Annealing ◽

Excimer Laser Annealing

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Laser Activated Radical Generation in Rapid Thermal Processing

2007 15th International Conference on Advanced Thermal Processing of Semiconductors ◽

10.1109/rtp.2007.4383816 ◽

2007 ◽

Author(s):

Ignaz Eisele ◽

Andreas ABmuth ◽

Torsten Sulima

Keyword(s):

Thermal Processing ◽

Rapid Thermal Processing ◽

Radical Generation

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Ultra-Shallow Dopant Diffusion from Pre-Deposited RPCVD Monolayers of Arsenic and Phosphorus

2007 15th International Conference on Advanced Thermal Processing of Semiconductors ◽

10.1109/rtp.2007.4383825 ◽

2007 ◽

Author(s):

Milos Popadic ◽

Lis K. Nanver ◽

T.L.M. Scholtes

Keyword(s):

Dopant Diffusion

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Effect of Low Temperature Annealing Prior to Non-melt Laser Annealing in Ultra-shallow Junction Formation

2007 15th International Conference on Advanced Thermal Processing of Semiconductors ◽

10.1109/rtp.2007.4383860 ◽

2007 ◽

Author(s):

Takumi Fukaya ◽

Ryuta Yamada ◽

Yuki Tanaka ◽

Satoru Matsumoto ◽

Toshiharu Suzuki ◽

...

Keyword(s):

Low Temperature ◽

Laser Annealing ◽

Shallow Junction ◽

Low Temperature Annealing ◽

Junction Formation

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