shallow junction
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Nano-scale Depth Profiles of Electrical Properties of Phosphorus Doped Silicon for Ultra-Shallow Junction Evaluation

2021 ◽  
pp. 1-1
Author(s):  
Hung-Yuan Chang ◽  
Yew-Chung Sermon Wu ◽  
Chia-He Chang ◽  
Kun-Lin Lin ◽  
Abhijeet Joshi ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Shallow Junction ◽  
Depth Profiles ◽  
Nano Scale ◽  
Doped Silicon ◽  
Phosphorus Doped

Well-behaved Ge n+/p shallow junction achieved by plasma immersion ion implantation

Vacuum ◽  
2020 ◽  
Vol 180 ◽  
pp. 109528
Author(s):  
Yi-Ju Chen ◽  
Hsiu-Hsien Liao ◽  
Bing-Yue Tsui ◽  
Yao-Jen Lee ◽  
Chih-Jen Wang ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Shallow Junction ◽  
Plasma Immersion Ion Implantation

Degradation Mechanism of Ge N+-P Shallow Junction With Thin GeSn Surface Layer

2020 ◽  
Vol 67 (3) ◽  
pp. 1120-1125
Author(s):  
Bing-Yue Tsui ◽  
Hsiu-Hsien Liao ◽  
Yi-Ju Chen
Keyword(s):  
Surface Layer ◽  
Degradation Mechanism ◽  
Shallow Junction

scholarly journals Conformal and Ultra Shallow Junction Formation Achieved Using a Pulsed-Laser Annealing Process Integrated With a Modified Plasma Assisted Doping Method

IEEE Access ◽  
2020 ◽  
Vol 8 ◽  
pp. 172166-172174
Author(s):  
Seunghun Baik ◽  
Dong-Jae Kwon ◽  
Hongki Kang ◽  
Jae Eun Jang ◽  
Jaewon Jang ◽  
...  
Keyword(s):  
Laser Annealing ◽  
Pulsed Laser ◽  
Annealing Process ◽  
Shallow Junction ◽  
Pulsed Laser Annealing ◽  
Junction Formation

scholarly journals CVD Delta-Doped Boron Surface Layers for Ultra-Shallow Junction Formation

2019 ◽  
Vol 3 (2) ◽  
pp. 35-44 ◽  
Author(s):  
Francesco Sarubbi ◽  
Lis K. Nanver ◽  
Tom L. Scholtes
Keyword(s):  
Surface Layers ◽  
Shallow Junction ◽  
Junction Formation

Junction Photovoltage (JPV) Techniques for Ultra-Shallow Junction Characterization

2019 ◽  
Vol 11 (3) ◽  
pp. 135-147 ◽  
Author(s):  
Vladimir N. Faifer ◽  
Michael I. Current ◽  
D. Schroder ◽  
Trudo Clarysse ◽  
Wilfried Vandervorst
Keyword(s):  
Shallow Junction

Ultra-Shallow Junction Formation by Plasma doping and Excimer Laser Annealing

2019 ◽  
Vol 19 (1) ◽  
pp. 87-94 ◽  
Author(s):  
Lak-Myung Jung ◽  
Seung-Woo Do ◽  
Jae-Min Kim ◽  
Seong Ho Kong ◽  
Ki-Hong Nam ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Laser Annealing ◽  
Excimer Laser Annealing ◽  
Shallow Junction ◽  
Plasma Doping ◽  
Junction Formation

A Novel High Photon Detection Efficiency Silicon Photomultiplier With Shallow Junction in 0.35 $\mu$ m CMOS

2019 ◽  
Vol 40 (9) ◽  
pp. 1471-1474 ◽  
Author(s):  
Nicola D'Ascenzo ◽  
Emanuele Antonecchia ◽  
Andreas Brensing ◽  
Werner Brockherde ◽  
Stefan Dreiner ◽  
...  
Keyword(s):  
Detection Efficiency ◽  
Silicon Photomultiplier ◽  
Photon Detection ◽  
Shallow Junction ◽  
Photon Detection Efficiency
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