1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ASMC 97 Proceedings
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Mask cycle time and serviceability improvement through capacity planning and scheduling software

1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ASMC 97 Proceedings ◽

10.1109/asmc.1997.630706 ◽

2002 ◽

Author(s):

M. Caron ◽

D. Fronckowiak ◽

P. Hayes ◽

P. Miller

Keyword(s):

Capacity Planning ◽

Planning And Scheduling

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Some practical considerations in selecting the automated material transport system for a semiconductor factory

1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ASMC 97 Proceedings ◽

10.1109/asmc.1997.630763 ◽

2002 ◽

Author(s):

J.J. Davis ◽

P.K. Goel

Keyword(s):

Transport System ◽

Material Transport

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Effects of defect propagation/growth on in-line defect based yield prediction

1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ASMC 97 Proceedings ◽

10.1109/asmc.1997.630711 ◽

2002 ◽

Author(s):

R.K. Nurani ◽

A.J. Strojwas ◽

W. Shindo

Keyword(s):

Yield Prediction ◽

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Advanced yield enhancement: integrated yield analysis

1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ASMC 97 Proceedings ◽

10.1109/asmc.1997.630708 ◽

2002 ◽

Author(s):

F. Lee

Keyword(s):

Yield Enhancement ◽

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Continuous flow manufacturing: the ultimate theory of constraints

1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ASMC 97 Proceedings ◽

10.1109/asmc.1997.630738 ◽

2002 ◽

Author(s):

O. Ruelle

Keyword(s):

Continuous Flow ◽

Theory Of Constraints

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300 mm fab automation technology options and selection criteria

1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ASMC 97 Proceedings ◽

10.1109/asmc.1997.630765 ◽

2002 ◽

Author(s):

M. Weiss

Keyword(s):

Selection Criteria ◽

Automation Technology

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Optical flatness and alignment mark contrast in highly planar technologies

1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ASMC 97 Proceedings ◽

10.1109/asmc.1997.630752 ◽

2002 ◽

Author(s):

J. Golz ◽

A. Martin ◽

B. Chen

Keyword(s):

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Analysis of electrical test data using a neural network approach

1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ASMC 97 Proceedings ◽

10.1109/asmc.1997.630702 ◽

2002 ◽

Author(s):

B. Koppenhoefer ◽

S. Wuerthner ◽

L. Ludwig ◽

W. Rosenstiel ◽

H.-H. Kuge ◽

...

Keyword(s):

Neural Network ◽

Test Data ◽

Network Approach ◽

Neural Network Approach ◽

Electrical Test

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Modeling, scheduling, and dispatching in the dynamic environment of semiconductor manufacturing at FASL, Japan

1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ASMC 97 Proceedings ◽

10.1109/asmc.1997.630779 ◽

2002 ◽

Author(s):

B. Pickett ◽

M. Zuniga

Keyword(s):

Semiconductor Manufacturing ◽

Dynamic Environment

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Statistical process simulation with neural network single step feed-back for automatic process monitoring and control

1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ASMC 97 Proceedings ◽

10.1109/asmc.1997.630701 ◽

2002 ◽

Author(s):

V.M.C. Chen ◽

Yung-Tao Lin ◽

Yeng-Kaung Peng

Keyword(s):

Neural Network ◽

Process Monitoring ◽

Process Simulation ◽

Single Step ◽

Automatic Process ◽

Monitoring And Control ◽

Statistical Process ◽

Process Monitoring And Control ◽

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