13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259)

Study of airborne molecular contamination in minienvironments

13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259) ◽

10.1109/asmc.2002.1001624 ◽

2003 ◽

Cited By ~ 1

Author(s):

Sheng-Bai Zhu

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An approach to recipe control in wafer fab

13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259) ◽

10.1109/asmc.2002.1001621 ◽

2003 ◽

Cited By ~ 2

Author(s):

G. Baweja ◽

M. Chandrasekaran ◽

Bing Ouyang

Keyword(s):

Wafer Fab

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Spare parts expense management system [semiconductor manufacturing]

13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259) ◽

10.1109/asmc.2002.1001631 ◽

2003 ◽

Author(s):

D. Yao ◽

C. Blouin ◽

M. Cavanaugh ◽

G. Boldman ◽

B. Alvarez ◽

...

Keyword(s):

Management System ◽

Semiconductor Manufacturing ◽

Spare Parts

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Controlling lithographic imaging performance at sub-100 nm CD with optical measurements

13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259) ◽

10.1109/asmc.2002.1001566 ◽

2003 ◽

Author(s):

I. Grodnensky ◽

S. Enayati ◽

J. Manka ◽

S. Mizutani ◽

S. Slonaker

Keyword(s):

Optical Measurements ◽

Imaging Performance

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Advanced Process Control: benefits for photolithography process control

13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259) ◽

10.1109/asmc.2002.1001582 ◽

2003 ◽

Cited By ~ 2

Author(s):

C. Gould

Keyword(s):

Process Control ◽

Advanced Process Control ◽

Photolithography Process

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Epi resistivity profiles without wafer damage

13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259) ◽

10.1109/asmc.2002.1001590 ◽

2003 ◽

Cited By ~ 1

Author(s):

K. Woolford ◽

C. Panczyk ◽

G. Martel

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In-line electrical characterization of ultrathin gate dielectric films

13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259) ◽

10.1109/asmc.2002.1001563 ◽

2003 ◽

Author(s):

F. Cubaynes ◽

S. Passefort ◽

K. Eason ◽

Xiafang Zhang ◽

L. Date ◽

...

Keyword(s):

Gate Dielectric ◽

Electrical Characterization ◽

Dielectric Films

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Comprehensive and easy to use SEM analysis structures for BiCMOS process development

13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259) ◽

10.1109/asmc.2002.1001639 ◽

2003 ◽

Cited By ~ 1

Author(s):

S. Leibiger

Keyword(s):

Process Development ◽

Sem Analysis ◽

Bicmos Process

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Wafer level packaging and 3D interconnect for IC technology

13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259) ◽

10.1109/asmc.2002.1001606 ◽

2003 ◽

Cited By ~ 8

Author(s):

R. Islam ◽

C. Brubaker ◽

P. Lindner ◽

C. Schaefer

Keyword(s):

Wafer Level ◽

Wafer Level Packaging ◽

Ic Technology

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Equipment productivity improvement via inline qualification implementation

13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259) ◽

10.1109/asmc.2002.1001607 ◽

2003 ◽

Cited By ~ 1

Author(s):

N. Lafferty ◽

B. Fiol ◽

P. Jowett ◽

Y. Karzhavin ◽

T. Urenda

Keyword(s):

Productivity Improvement

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13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259)
Latest Publications

TOTAL DOCUMENTS

H-INDEX

Published By IEEE

Study of airborne molecular contamination in minienvironments

An approach to recipe control in wafer fab

Spare parts expense management system [semiconductor manufacturing]

Controlling lithographic imaging performance at sub-100 nm CD with optical measurements

Advanced Process Control: benefits for photolithography process control

Epi resistivity profiles without wafer damage

In-line electrical characterization of ultrathin gate dielectric films

Comprehensive and easy to use SEM analysis structures for BiCMOS process development

Wafer level packaging and 3D interconnect for IC technology

Equipment productivity improvement via inline qualification implementation

Export Citation Format

13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259)Latest Publications

TOTAL DOCUMENTS

H-INDEX

Published By IEEE

Study of airborne molecular contamination in minienvironments

An approach to recipe control in wafer fab

Spare parts expense management system [semiconductor manufacturing]

Controlling lithographic imaging performance at sub-100 nm CD with optical measurements

Advanced Process Control: benefits for photolithography process control

Epi resistivity profiles without wafer damage

In-line electrical characterization of ultrathin gate dielectric films

Comprehensive and easy to use SEM analysis structures for BiCMOS process development

Wafer level packaging and 3D interconnect for IC technology

Equipment productivity improvement via inline qualification implementation

13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259)
Latest Publications