Controlling lithographic imaging performance at sub-100 nm CD with optical measurements

1986 ◽

Vol 44 ◽

pp. 480-481

Author(s):

W. E. Lee

Keyword(s):

Refractive Index ◽

Benzoic Acid ◽

Optical Waveguides ◽

Total Internal Reflection ◽

Index Of Refraction ◽

Optical Measurements ◽

Lithium Ions ◽

Wide Channel ◽

Tem Characterization

An optical waveguide consists of a several-micron wide channel with a slightly different index of refraction than the host substrate; light can be trapped in the channel by total internal reflection.Optical waveguides can be formed from single-crystal LiNbO3 using the proton exhange technique. In this technique, polished specimens are masked with polycrystal1ine chromium in such a way as to leave 3-13 μm wide channels. These are held in benzoic acid at 249°C for 5 minutes allowing protons to exchange for lithium ions within the channels causing an increase in the refractive index of the channel and creating the waveguide. Unfortunately, optical measurements often reveal a loss in waveguiding ability up to several weeks after exchange.

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The influence of confocal microscope design on imaging performance

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100146564 ◽

1993 ◽

Vol 51 ◽

pp. 144-145

Author(s):

C J R Sheppard

Keyword(s):

Image Quality ◽

Fluorescence Imaging ◽

Confocal Microscope ◽

Industrial Applications ◽

Three Dimensions ◽

Design Parameters ◽

Weak Signals ◽

Size And Shape ◽

Imaging Performance ◽

Fundamental Limitation

The confocal microscope is now widely used in both biomedical and industrial applications for imaging, in three dimensions, objects with appreciable depth. There are now a range of different microscopes on the market, which have adopted a variety of different designs. The aim of this paper is to explore the effects on imaging performance of design parameters including the method of scanning, the type of detector, and the size and shape of the confocal aperture.It is becoming apparent that there is no such thing as an ideal confocal microscope: all systems have limitations and the best compromise depends on what the microscope is used for and how it is used. The most important compromise at present is between image quality and speed of scanning, which is particularly apparent when imaging with very weak signals. If great speed is not of importance, then the fundamental limitation for fluorescence imaging is the detection of sufficient numbers of photons before the fluorochrome bleaches.

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A new method for the observation of Type II magnetic contrast

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100176952 ◽

1990 ◽

Vol 48 (4) ◽

pp. 764-765

Author(s):

R.P. Ferrier ◽

S. McVitie

Keyword(s):

Domain Walls ◽

Incident Beam ◽

Objective Lens ◽

Type Ii ◽

Backscattering Coefficient ◽

Magnetic Contrast ◽

Standard Geometry ◽

Backscattered Electron ◽

Imaging Performance ◽

Good Probe

Type II magnetic contrast was first observed by Philibert and Tixier and relies on the change in the effective backscattering coefficient due to interaction of the scattered electrons within the specimen and the local magnetic induction (for a review see Tsuno). Depending on the tilt of the specimen and the position of the backscattered electron detector(s), contrast due to the presence of either or both domains and domain walls can be obtained; in the case of the latter, the standard geometry is for the specimen to be normal to the incident beam and the detectors are positioned above it and close to the optic axis. This is the geometry adopted in our studies, which used a JEOL 2000FX with a special split objective lens polepiece; this permitted the specimen to be in magnetic field-free space, the separate lens gaps above and below allowing good probe forming capabilities combined with excellent Lorentz imaging performance. A schematic diagram is shown in Fig. 1.

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New Feasible Concepts of Aberration Correction for Realizing High-Resolution Electron Microscopes

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100179762 ◽

1990 ◽

Vol 48 (1) ◽

pp. 202-203

Author(s):

H. Rose

Keyword(s):

Spherical Aberration ◽

Wave Length ◽

Electron Wave ◽

Optical Lens ◽

Resolution Electron ◽

Rotationally Symmetric ◽

Electron Microscopes ◽

The Cost ◽

Imaging Performance ◽

Acceleration Voltage

The imaging performance of the light optical lens systems has reached such a degree of perfection that nowadays numerical apertures of about 1 can be utilized. Compared to this state of development the objective lenses of electron microscopes are rather poor allowing at most usable apertures somewhat smaller than 10-2 . This severe shortcoming is due to the unavoidable axial chromatic and spherical aberration of rotationally symmetric electron lenses employed so far in all electron microscopes.The resolution of such electron microscopes can only be improved by increasing the accelerating voltage which shortens the electron wave length. Unfortunately, this procedure is rather ineffective because the achievable gain in resolution is only proportional to λ1/4 for a fixed magnetic field strength determined by the magnetic saturation of the pole pieces. Moreover, increasing the acceleration voltage results in deleterious knock-on processes and in extreme difficulties to stabilize the high voltage. Last not least the cost increase exponentially with voltage.

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