Abrasive machining is an important process for the manufacturing of advanced ceramics. The demand for advanced ceramics with better quality and higher efficiency presents tremendous challenges for abrasive tools in the advanced ceramics industry. The concept of semi-fixed abrasive machining with a newly developed semi-fixed abrasive tool (SFAT) as machining tool is put forward. This paper presents an experimental investigation for SFAT wear into course of machining single crystal silicon with SFAT. Process parameters (water flow, load and velocity) influencing the SFAT wear are analyzed. Influencing factor of SFAT wear in processing course has been clearly demonstrated.