Thermodynamic Calculations of ZrC-SiC System for Chemical Vapor Deposition Applications from SiCl4-ZrCl4-CH4-H2

2010 ◽  
pp. 65-75
Author(s):  
Qiaomu Liu ◽  
Litong Zhang ◽  
Yiguang Wang ◽  
Laifei Cheng
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Thermodynamic Calculations

Thermodynamic calculations on the chemical vapor deposition of Si–C–N from the SiCl4–NH3–C3H6–H2–Ar system

2013 ◽  
Vol 39 (4) ◽  
pp. 3971-3977 ◽  
Author(s):  
Xiaofei Liu ◽  
Litong Zhang ◽  
Yongsheng Liu ◽  
Fang Ye ◽  
Xiaowei Yin
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Thermodynamic Calculations
Sign in / Sign up

Export Citation Format

Share Document