Synthesis of Nanocrystalline Diamond Films by Microwave Plasma CVD

2012 ◽  
pp. 39-50 ◽  
Author(s):  
R. Ramamurti ◽  
V. Shanov ◽  
R. N. Singh
Keyword(s):  
Microwave Plasma ◽  
Diamond Films ◽  
Nanocrystalline Diamond ◽  
Plasma Cvd ◽  
Nanocrystalline Diamond Films ◽  
Microwave Plasma Cvd

scholarly journals Deposition of Nanocrystalline Diamond Films on Pure Ti by CH4/H2 Microwave Plasma CVD

2005 ◽  
Vol 54 (1) ◽  
pp. 73-78
Author(s):  
Cheolmun YIM ◽  
Dohoon SHIN ◽  
Yusuke HAYASHI ◽  
Keishi IRIE ◽  
Ri-ichi MURAKAMI ◽  
...  
Keyword(s):  
Microwave Plasma ◽  
Diamond Films ◽  
Nanocrystalline Diamond ◽  
Plasma Cvd ◽  
Nanocrystalline Diamond Films ◽  
Microwave Plasma Cvd

Formation of diamond and nanocrystalline diamond films by microwave plasma CVD

2002 ◽  
Vol 407 (1-2) ◽  
pp. 18-25 ◽  
Author(s):  
Mineo Hiramatsu ◽  
Chi Hian Lau ◽  
Andrew Bennett ◽  
John S. Foord
Keyword(s):  
Microwave Plasma ◽  
Diamond Films ◽  
Nanocrystalline Diamond ◽  
Plasma Cvd ◽  
Nanocrystalline Diamond Films ◽  
Microwave Plasma Cvd

Growth of nanocrystalline diamond films deposited by microwave plasma CVD system at low substrate temperatures

2006 ◽  
Vol 203 (12) ◽  
pp. 3011-3015 ◽  
Author(s):  
S. Potocky ◽  
A. Kromka ◽  
J. Potmesil ◽  
Z. Remes ◽  
Z. Polackova ◽  
...  
Keyword(s):  
Microwave Plasma ◽  
Diamond Films ◽  
Nanocrystalline Diamond ◽  
Plasma Cvd ◽  
Nanocrystalline Diamond Films ◽  
Microwave Plasma Cvd ◽  
Substrate Temperatures

Deposition of large area uniform diamond films by microwave plasma CVD

Vacuum ◽  
2018 ◽  
Vol 147 ◽  
pp. 134-142 ◽  
Author(s):  
J. Weng ◽  
F. Liu ◽  
L.W. Xiong ◽  
J.H. Wang ◽  
Q. Sun
Keyword(s):  
Microwave Plasma ◽  
Diamond Films ◽  
Plasma Cvd ◽  
Large Area ◽  
Microwave Plasma Cvd

High-speed synthesis of heavily boron-doped diamond films by in-liquid microwave plasma CVD

2019 ◽  
Vol 92 ◽  
pp. 41-46 ◽  
Author(s):  
Yohei Harada ◽  
Ryota Hishinuma ◽  
Nicolae Spătaru ◽  
Yusei Sakurai ◽  
Kazuya Miyasaka ◽  
...  
Keyword(s):  
High Speed ◽  
Microwave Plasma ◽  
Diamond Films ◽  
Plasma Cvd ◽  
Boron Doped Diamond ◽  
Boron Doped ◽  
Microwave Plasma Cvd

Study of Undoped Nanocrystalline Diamond Films Grown by Microwave Plasma-Assisted Chemical Vapor Deposition

2021 ◽  
Vol 55 (1) ◽  
pp. 66-75
Author(s):  
A. L. Vikharev ◽  
S. A. Bogdanov ◽  
N. M. Ovechkin ◽  
O. A. Ivanov ◽  
D. B. Radishev ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Microwave Plasma ◽  
Diamond Films ◽  
Chemical Vapor ◽  
Nanocrystalline Diamond ◽  
Nanocrystalline Diamond Films
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