Influence of substrate temperature on composition, structure and electrical properties of plasma polymerized thin films of tetramethyl silane and ammonia mixture
1990 ◽
Vol 46
(0)
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pp. 209-242
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Keyword(s):
2013 ◽
Vol 139
(1)
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pp. 270-275
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2017 ◽
Vol 418
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pp. 280-290
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2009 ◽
Vol 487
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pp. 280-285
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2006 ◽
Vol 39
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pp. 4777-4782
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1991 ◽
Vol 2
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pp. 152-156
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2016 ◽
Vol 380
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pp. 2842-2848
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