electron beam evaporation
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Coatings ◽  
2022 ◽  
Vol 12 (1) ◽  
pp. 82
Author(s):  
Yury G. Yushkov ◽  
Efim M. Oks ◽  
Andrey V. Tyunkov ◽  
Denis B. Zolotukhin

This is a review of current developments in the field of ion-plasma and beam methods of synthesis of protective and functional dielectric coatings. We give rationales for attractiveness and prospects of creating such coatings by electron-beam heating and following evaporation of dielectric targets. Forevacuum plasma electron sources, operating at elevated pressure values from units to hundreds of pascals, make it possible to exert the direct action of an electron beam on low-conductive materials. Electron-beam evaporation of aluminum oxide, boron, and silicon carbide targets is used to exemplify the particular features of electron-beam synthesis of such coatings and their parameters and characteristics.


Coatings ◽  
2021 ◽  
Vol 12 (1) ◽  
pp. 19
Author(s):  
Chuen-Lin Tien ◽  
Hong-Yi Lin ◽  
Kuan-Sheng Cheng ◽  
Chun-Yu Chiang ◽  
Ching-Ying Cheng

This study presents a multilayer design and fabrication of an optical notch filter for enhancing visual quality. A cost-effective multilayer design of notch filter with low surface roughness and low residual stress is proposed. A 9-layer notch filter composed of SiO2 and Nb2O5 with a central wavelength of 480 nm is prepared by electron beam evaporation combined with ion-assisted deposition. The optical transmittance, residual stress, and surface morphology are measured by a UV/VIS/NIR spectrophotometer, Twyman-Green interferometer and field emission scanning electron microscopy (FE-SEM). The transmittance of the notch filter at the central wavelength is above 15%, and the average transmittance of the transmission band is about 80%. The residual stress of the notch filter is −0.235 GPa, and the root mean square surface roughness is 1.85 nm. For improving the visual quality, a good image contrast can be obtained by observing the microscopic image using the proposed notch filter.


Metals ◽  
2021 ◽  
Vol 11 (12) ◽  
pp. 2061
Author(s):  
Zongsheng He ◽  
Ziyu Li ◽  
Xiaona Jiang ◽  
Chuanjian Wu ◽  
Yu Liu ◽  
...  

This work demonstrates the dependence between magnetic properties and the thickness of NiFe thin films. More importantly, a quantitative study of the surface composition of NiFe thin film exposed to atmospheric conditions has been carried out employing angle-resolved X-ray photoelectron spectroscopy (ARXPS). In this study, we fabricated Ni81Fe19 (NiFe) thin films on Si (100) substrate using electron beam evaporation and investigated their surface morphologies, magnetic properties, and the thickness of the surface oxide layer. The coexistence of metallic and oxidized species on the surface are suggested by the depth profile of ARXPS spectra. The thickness of the oxidized species, including NiO, Ni(OH)2, Fe2O3, and Fe3O4, are also estimated based on the ARXPS results. This work provides an effective approach to clarify the surface composition, as well as the thickness of the oxide layer of the thin films.


Coatings ◽  
2021 ◽  
Vol 11 (12) ◽  
pp. 1513
Author(s):  
Chuen-Lin Tien ◽  
Hong-Yi Lin ◽  
Kuan-Sheng Cheng ◽  
Chih-Kai Chang

We present a new laser protective lens based on a multilayered notch filter design with low residual stress and low surface roughness. An18-layer notch filter was prepared by electron beam evaporation with an ion-assisted deposition technique, which was composed of SiO2 and Nb2O5 with a center wavelength of 532 nm. The optical transmittance, residual stress, surface roughness, and surface morphology were measured by a UV/VIS/NIR spectrophotometer, Twyman–Green interferometer, scanning probe microscope, Linnik microscopic interferometer, and field-emission scanning electron microscopy (FE-SEM). The transmittance of the notch filters at center wavelength is 0.2%, and the average transmittance of the transmission band is about 70%. The residual stress of the notch filter is −0.298 GPa, and the root mean square surface roughness is 1.88 nm. The experimental results show that the optical transmittance meets the design requirements.


2021 ◽  
Vol 2064 (1) ◽  
pp. 012106
Author(s):  
V G Ilves ◽  
S Y Sokovnin ◽  
M A Uimin

Abstract Various bismuth containing compounds are promising in many applications, including for creating photocatalysts based on them using a visible range of light. However, strong polymorphism (9 polymophic phases of Bi2O3), thermal instability and changes in the properties of bismuth oxide during long-term storage significantly complicate work with it. One way to increase stability and improve photocatalytic properties is by doping Bi2O3 with various metals. Ag doped Bi2O3 nanoparticles (NPs) are typically produced using chemical techniques often associated with the presence of toxic chemicals. The present paper used an environmentally friendly method of producing NPs using the method of pulsed electron beam evaporation in vacuum. The evaporation target was obtained by solid phase synthesis in an electric furnace on air using silver nitrate additives (1 and 5 wt.%). Textural, thermal and magnetic properties of the obtained NPs have been studied. Was found that the Ag-Bi2O3 NPs have a specific surface area (SSA) of 23.7 m2/g, which was almost 2 times bigger than the SSA of the pure Bi2O3 (13.2 m2/g) obtained previously. The thermal stability of the Ag-doped Bi2O3 samples was maintained to the temperature 350°C. While further heating on air took place the phase transition β → α


2021 ◽  
Vol 2064 (1) ◽  
pp. 012072
Author(s):  
E M Oks’ ◽  
A V Tyunkov ◽  
Y G Yushkov ◽  
D B Zolotukhin

Abstract This paper presents the experimental study of dielectric coatings based on aluminum oxide (Al2O3) and aluminum nitride (AlN) ceramics as applied to their use in microelectronics. It is shown that the coatings obtained by electron-beam evaporation of ceramic in forevacuum pressures (1-100 Pa) endow devices with required dielectric parameters and improves heat sink from the surface of monolithic integral circuits.


2021 ◽  
Vol 2064 (1) ◽  
pp. 012087
Author(s):  
A Svetlova ◽  
S Yu Sokovnin ◽  
V G Il’ves

Abstract Nanopowders doped with silver were produced by the method of pulsed electron beam evaporation. The pore sizes of the nanoparticles were 25-32 nm. Evaluation of photocatalytic and cytotoxic properties on cells was carried out. The prospects of using multimodal nanopowders as a photocatalytic agent, as well as for use in medicine, have been shown.


2021 ◽  
Vol 66 (6) ◽  
pp. 1090-1094
Author(s):  
V. V. Privezentsev ◽  
A. P. Sergeev ◽  
A. A. Firsov ◽  
E. E. Yakimov ◽  
D. V. Irzhak

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