Recursive Bayesian state estimation method for run‐to‐run control in high‐mixed semiconductor manufacturing process

2018 ◽  
Vol 22 (3) ◽  
pp. 1177-1187 ◽  
Author(s):  
Fei Tan ◽  
Tianhong Pan ◽  
Jun Bian ◽  
Haiyan Wang ◽  
Weiran Wang
Keyword(s):  
State Estimation ◽  
Manufacturing Process ◽  
Semiconductor Manufacturing ◽  
Estimation Method ◽  
Recursive Bayesian

NanoProbing on 7 nm FinFET Devices in an SRAM Array: Challenges and Solutions

2019 ◽  
Author(s):  
Anqi Qiu ◽  
William Lowe ◽  
Mridul Arora
Keyword(s):  
Manufacturing Process ◽  
Semiconductor Manufacturing

Abstract Nanoprobing systems have evolved to meet the challenges from recent innovations in the semiconductor manufacturing process. This is demonstrated through an exhibition of standard SRAM measurements on TSMC 7 nm FinFET technology. SEM based nanoprober is shown to meet or exceed the requirements for measuring 7nm technology and beyond. This paper discusses in detail of the best-known methods for nanoprobing on 7nm technology.

scholarly journals A Two-layer Sequential State Estimation Method for electricity and heat Networks

2021 ◽  
Vol 1802 (3) ◽  
pp. 032088
Author(s):  
Xiaonan Yang ◽  
Yansheng Lang ◽  
Heng Zhang ◽  
Yan Lv ◽  
Chengzhi Zhu ◽  
...  
Keyword(s):  
State Estimation ◽  
Estimation Method ◽  
Heat Networks

A robust bilinear three-phase state estimation method for power systems

2016 ◽  
Author(s):  
Weiye Zheng ◽  
Wenchuan Wu ◽  
Xincong Shi ◽  
Boming Zhang ◽  
Junwei Yang
Keyword(s):  
Power Systems ◽  
State Estimation ◽  
Phase State ◽  
Estimation Method ◽  
Three Phase
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