Identification and Characterization of Monomeric, Volatile SiCl3NH2 as Product of the Reaction Between SiCl4 and NH3: An Important Intermediate on the Way to Silicon Nitride?
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2003 ◽
Vol 9
(6)
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pp. 1387-1393
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2014 ◽
Vol 184
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pp. 103-110
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