Characterization of capillary inner surface conditions with streaming potential

2021 ◽  
Author(s):  
Yuri Chenyakin ◽  
David Da Yong Chen
Keyword(s):  
Streaming Potential ◽  
Surface Conditions ◽  
Inner Surface

The Use of Metallographic and SEM Analysis for Characterization of Sidewall Surfaces in MEMS Devices with DRIE Processing

2010 ◽  
Vol 2010 (1) ◽  
pp. 000703-000706
Author(s):  
Colin Stevens ◽  
Robert Dean ◽  
Samuel Lawrence ◽  
Lee Levine
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Measurement Techniques ◽  
Sem Analysis ◽  
Defect Structures ◽  
Mems Devices ◽  
Depth Of Focus ◽  
Surface Conditions ◽  
Side Walls

The Bosch Deep Reactive Ion Etch Process is commonly used for the manufacture of MEMS and MOEMS devices that require deep high aspect ratio trenches. In many cases fully released, high aspect ratio features can be generated in one pass. However the process must be understood to avoid generating some of the defect structures that are characteristic of the process. Defects such as scalloping, silicon grass, and undercutting at the interface of a nonconductive layer can be controlled by process parameters and optimization. Measurement and characterization of the defective structures is a key element of controlling them. The use of SEM measurement techniques for characterizing the small features associated with scalloping and silicon grass is essential. No other technique is capable of providing the large depth of focus required to visualize these features. The use of metallographic techniques furthers understanding of the surface conditions on the side walls of these deep trenches.

Tangential streaming potential/current measurements for the characterization of composite membranes

2012 ◽  
Vol 423-424 ◽  
pp. 413-421 ◽  
Author(s):  
Sébastien Déon ◽  
Patrick Fievet ◽  
Choukri Osman Doubad
Keyword(s):  
Streaming Potential ◽  
Composite Membranes

One-pot synthesis and characterization of HMS silica carrying Disperse-Red-1 (DR1) covalently bonded to the inner surface

2005 ◽  
Vol 8 (3-4) ◽  
pp. 655-661 ◽  
Author(s):  
Barbara Onida ◽  
Luisa Borello ◽  
Sonia Fiorilli ◽  
Barbara Bonelli ◽  
Claudia Barolo ◽  
...  
Keyword(s):  
Synthesis And Characterization ◽  
One Pot ◽  
One Pot Synthesis ◽  
Covalently Bonded ◽  
Inner Surface ◽  
Disperse Red 1

Electrokinetic characterization of the Al2O3 ceramic MF membrane by streaming potential measurements

Desalination ◽  
2009 ◽  
Vol 235 (1-3) ◽  
pp. 102-109 ◽  
Author(s):  
Jianer Zhou ◽  
Xiaozhen Zhang ◽  
Yongqing Wang ◽  
Xuebing Hu ◽  
A. Larbot ◽  
...  
Keyword(s):  
Streaming Potential ◽  
Al2o3 Ceramic ◽  
Electrokinetic Characterization

Characterization of Polyelectrolyte Multilayers by the Streaming Potential Method

Langmuir ◽  
2004 ◽  
Vol 20 (24) ◽  
pp. 10517-10525 ◽  
Author(s):  
Z. Adamczyk ◽  
M. Zembala ◽  
P. Warszyński ◽  
B. Jachimska
Keyword(s):  
Streaming Potential ◽  
Potential Method ◽  
Polyelectrolyte Multilayers
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