Recent progress and perspectives on atomic‐layer‐deposited semiconducting oxides for transistor applications

Author(s):  
Min Hoe Cho ◽  
Cheol Hee Choi ◽  
Jae Kyeong Jeong
2017 ◽  
Vol 70 ◽  
pp. 1182-1191 ◽  
Author(s):  
Hong Chen Guo ◽  
Enyi Ye ◽  
Zibiao Li ◽  
Ming-Yong Han ◽  
Xian Jun Loh

2016 ◽  
Vol 3 (21) ◽  
pp. 1600354 ◽  
Author(s):  
Do Han Kim ◽  
Mark D. Losego ◽  
Qing Peng ◽  
Gregory N. Parsons

2017 ◽  
Vol 4 (2) ◽  
pp. 133-154 ◽  
Author(s):  
Xiangbo Meng ◽  
Xinwei Wang ◽  
Dongsheng Geng ◽  
Cagla Ozgit-Akgun ◽  
Nathanaelle Schneider ◽  
...  

This review article summarizes the recent progress of atomic layer deposition (ALD) in energy technologies including rechargeable secondary batteries, fuel cells, photovoltaics, and optoelectronics.


1991 ◽  
Vol 222 ◽  
Author(s):  
S. M. Bedair

ABSTRACTThe potential applications of Atomic Layer Epitaxy of III–V compounds will be outlined. These include the growth of special structures and devices such as ordered alloys, ultra-thin quantum wells, non-alloyed contacts, planar doped FET's and HBT's. Also, the main challenges facing ALE will be outlined along with possible solutions. These include reactor design, control of carbon doping and the growth of ternary alloys. A general assessment of the ALE technology will be provided.


1988 ◽  
Vol 93 (1-4) ◽  
pp. 182-189 ◽  
Author(s):  
S.M. Bedair ◽  
B.T. McDermott ◽  
Y. Ide ◽  
N.H. Karam ◽  
H. Hashemi ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document