Identifying the mechanism of formation of chlorinated silane polymer by‐products during chemical vapor infiltration of SiC from CH 3 SiCl 3 /H 2

Author(s):  
Noboru Sato ◽  
Yasuyuki Fukushima ◽  
Kohei Shima ◽  
Yuichi Funato ◽  
Takeshi Momose ◽  
...  
2016 ◽  
Vol 31 (3) ◽  
pp. 298
Author(s):  
TANG Zhe-Peng ◽  
ZHANG Zhong-Wei ◽  
FANG Jin-Ming ◽  
PENG Yu-Qing ◽  
LI Ai-Jun ◽  
...  

2009 ◽  
Vol 24 (5) ◽  
pp. 939-942 ◽  
Author(s):  
Zhi-Xin MENG ◽  
Lai-Fei CHENG ◽  
Li-Tong ZHANG ◽  
Yong-Dong XU ◽  
Xiu-Feng HAN

2015 ◽  
Vol 109 ◽  
pp. 381-389 ◽  
Author(s):  
M. Albano ◽  
R. Pastore ◽  
A. Delfini ◽  
D. Micheli ◽  
F. Volpini ◽  
...  

2019 ◽  
Vol 45 (4) ◽  
pp. 4335-4341 ◽  
Author(s):  
Peng Xiao ◽  
Zeyan Liu ◽  
Zhi Chao Li ◽  
Bengu Zhang ◽  
Zhuan Li ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document