Multilayer antireflection coatings design for SiO 2 ‐passivated silicon solar cells

2022 ◽  
Vol 53 (1) ◽  
pp. 80-88
Author(s):  
X.J. Xiao ◽  
H.M. Zhu ◽  
Z.M. Liu ◽  
J.L. Tu
2014 ◽  
Vol 2014 ◽  
pp. 1-5 ◽  
Author(s):  
Minghua Li ◽  
Hui Shen ◽  
Lin Zhuang ◽  
Daming Chen ◽  
Xinghua Liang

In this work we prepared double-layer antireflection coatings (DARC) by using the SiO2/SiNx:H heterostructure design. SiO2thin films were deposited by electron-beam evaporation on the conventional solar cell with SiNx:H single-layer antireflection coatings (SARC), while to avoid the coverage of SiO2on the front side busbars, a steel mask was utilized as the shelter. The thickness of the SiNx:H as bottom layer was fixed at 80 nm, and the varied thicknesses of the SiO2as top layer were 105 nm and 122 nm. The results show that the SiO2/SiNx:H DARC have a much lower reflectance and higher external quantum efficiency (EQE) in short wavelengths compared with the SiNx:H SARC. A higher energy conversion efficiency of 17.80% was obtained for solar cells with SiO2(105 nm)/SiNx:H (80 nm) DARC, an absolute conversion efficiency increase of 0.32% compared with the conventional single SiNx:H-coated cells.


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