Fabrication of thick AlN film by low pressure hydride vapor phase epitaxy

2006 ◽  
Vol 3 (6) ◽  
pp. 1479-1482 ◽  
Author(s):  
Yu-Huai Liu ◽  
Tomoaki Tanabe ◽  
Hideto Miyake ◽  
Kazumasa Hiramatsu ◽  
Tomohiko Shibata ◽  
...  
Keyword(s):  
Vapor Phase ◽  
Low Pressure ◽  
Vapor Phase Epitaxy ◽  
Hydride Vapor Phase Epitaxy ◽  
Aln Film

Fabrication of crack-free AlN film on sapphire by hydride vapor phase epitaxy using an in situ etching method

2016 ◽  
Vol 9 (4) ◽  
pp. 045501 ◽  
Author(s):  
Xue-Hua Liu ◽  
Ji-Cai Zhang ◽  
Xu-Jun Su ◽  
Jun Huang ◽  
Shu-Nan Zheng ◽  
...  
Keyword(s):  
Vapor Phase ◽  
Vapor Phase Epitaxy ◽  
Hydride Vapor Phase Epitaxy ◽  
Etching Method ◽  
Aln Film

AlN Grown ona- andn-Plane Sapphire Substrates by Low-Pressure Hydride Vapor Phase Epitaxy

2013 ◽  
Vol 52 (8S) ◽  
pp. 08JB31 ◽  
Author(s):  
Naoki Goriki ◽  
Hideto Miyake ◽  
Kazumasa Hiramatsu ◽  
Toru Akiyama ◽  
Tomonori Ito ◽  
...  
Keyword(s):  
Vapor Phase ◽  
Low Pressure ◽  
Vapor Phase Epitaxy ◽  
Hydride Vapor Phase Epitaxy ◽  
Sapphire Substrates

GaN Laterally Overgrown on Sapphire by Low Pressure Hydride Vapor Phase Epitaxy

2004 ◽  
Vol 457-460 ◽  
pp. 1581-1584
Author(s):  
J. Napierala ◽  
D.M. Martin ◽  
H.-J. Bühlmann ◽  
S. Gradecak ◽  
M. Ilegems
Keyword(s):  
Vapor Phase ◽  
Low Pressure ◽  
Vapor Phase Epitaxy ◽  
Hydride Vapor Phase Epitaxy

Electrical Characterization of Ruthenium-Doped InP Grown by Low Pressure Hydride Vapor Phase Epitaxy

2001 ◽  
Vol 4 (6) ◽  
pp. G53 ◽  
Author(s):  
D. Söderström ◽  
S. Lourdudoss ◽  
M. Wallnäs ◽  
A. Dadgar ◽  
O. Stenzel ◽  
...  
Keyword(s):  
Vapor Phase ◽  
Electrical Characterization ◽  
Low Pressure ◽  
Vapor Phase Epitaxy ◽  
Hydride Vapor Phase Epitaxy

Studies on Ruthenium-Doped InP Growth by Low-Pressure Hydride Vapor-Phase Epitaxy

2001 ◽  
Vol 148 (7) ◽  
pp. G375
Author(s):  
D. Söderström ◽  
S. Lourdudoss ◽  
M. Wallnäs ◽  
A. Dadgar ◽  
O. Stenzel ◽  
...  
Keyword(s):  
Vapor Phase ◽  
Low Pressure ◽  
Vapor Phase Epitaxy ◽  
Hydride Vapor Phase Epitaxy

Suppression of Crack Generation Using High-Compressive-Strain AlN/Sapphire Template for Hydride Vapor Phase Epitaxy of Thick AlN Film

2007 ◽  
Vol 46 (No. 23) ◽  
pp. L552-L555 ◽  
Author(s):  
Kenichi Tsujisawa ◽  
Shinya Kishino ◽  
Da-Bing Li ◽  
Hideto Miyake ◽  
Kazumasa Hiramatsu ◽  
...  
Keyword(s):  
Vapor Phase ◽  
Compressive Strain ◽  
Vapor Phase Epitaxy ◽  
Hydride Vapor Phase Epitaxy ◽  
Crack Generation ◽  
Aln Film

scholarly journals Heteroepitaxy of GaAsP and GaP on GaAs and Si by low pressure hydride vapor phase epitaxy

2020 ◽  
Vol 540 ◽  
pp. 125623 ◽  
Author(s):  
Axel Strömberg ◽  
Giriprasanth Omanakuttan ◽  
Yingjun Liu ◽  
Tangjie Mu ◽  
Zhehan Xu ◽  
...  
Keyword(s):  
Vapor Phase ◽  
Low Pressure ◽  
Vapor Phase Epitaxy ◽  
Hydride Vapor Phase Epitaxy
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