47.2: Lithography Simulation and OPC for Next Generation Display Technology
2020 ◽
Vol 26
(42)
◽
pp. 7672-7693
◽
2016 ◽
Vol 47
(1)
◽
pp. 747-750
◽
2006 ◽
Vol 83
(4-9)
◽
pp. 1142-1147
◽
2015 ◽
Vol 46
(1)
◽
pp. 73-75
◽