P‐15: Thermal Conductivity Measurement of Indium‐Gallium‐Zinc‐Oxide Thin Films Utilizing Three‐Omega Method

2020 ◽  
Vol 51 (1) ◽  
pp. 1365-1368
Author(s):  
Rauf Khan ◽  
Shim Chang-Hoon ◽  
Reiji Hattori
Keyword(s):  
Thin Films ◽  
Thermal Conductivity ◽  
Zinc Oxide ◽  
Conductivity Measurement ◽  
Thermal Conductivity Measurement ◽  
Indium Gallium Zinc Oxide ◽  
Oxide Thin Films ◽  
Omega Method ◽  
Indium Gallium ◽  
Three Omega Method

scholarly journals Thermal Conductivity of Nano-Crystallized Indium-Gallium-Zinc Oxide Thin Films Determined by Differential Three-Omega Method

Nanomaterials ◽  
2021 ◽  
Vol 11 (6) ◽  
pp. 1547
Author(s):  
Rauf Khan ◽  
Michitaka Ohtaki ◽  
Satoshi Hata ◽  
Koji Miyazaki ◽  
Reiji Hattori
Keyword(s):  
Thin Films ◽  
Thermal Conductivity ◽  
Zinc Oxide ◽  
Indium Gallium Zinc Oxide ◽  
Crystalline Materials ◽  
Omega Method ◽  
Indium Gallium ◽  
Α Al2o3 ◽  
Three Omega Method ◽  
Thermal Conductivities

The temperature dependence thermal conductivity of the indium-gallium-zinc oxide (IGZO) thin films was investigated with the differential three-omega method for the clear demonstration of nanocrystallinity. The thin films were deposited on an alumina (α-Al2O3) substrate by direct current (DC) magnetron sputtering at different oxygen partial pressures ([PO2] = 0%, 10%, and 65%). Their thermal conductivities at room temperature were measured to be 1.65, 1.76, and 2.58 Wm−1K−1, respectively. The thermal conductivities decreased with an increase in the ambient measurement temperature. This thermal property is similar to that of crystalline materials. Electron microscopy observations revealed the presence of nanocrystals embedded in the amorphous matrix of the IGZO films. The typical size of the nanocrystals was approximately 2–5 nm with the lattice distance of about 0.24–0.26 nm. These experimental results indicate that the nanocrystalline microstructure controls the heat conduction in the IGZO films.

Thermal Conductivity of Amorphous Indium–Gallium–Zinc Oxide Thin Films

2013 ◽  
Vol 6 (2) ◽  
pp. 021101 ◽  
Author(s):  
Toru Yoshikawa ◽  
Takashi Yagi ◽  
Nobuto Oka ◽  
Junjun Jia ◽  
Yuichiro Yamashita ◽  
...  
Keyword(s):  
Thin Films ◽  
Thermal Conductivity ◽  
Zinc Oxide ◽  
Indium Gallium Zinc Oxide ◽  
Oxide Thin Films ◽  
Indium Gallium

scholarly journals Thermal Conductivity Comparison of Indium Gallium Zinc Oxide Thin Films: Dependence on Temperature, Crystallinity, and Porosity

2016 ◽  
Vol 120 (14) ◽  
pp. 7467-7475 ◽  
Author(s):  
Boya Cui ◽  
Li Zeng ◽  
Denis Keane ◽  
Michael J. Bedzyk ◽  
D. Bruce Buchholz ◽  
...  
Keyword(s):  
Thin Films ◽  
Thermal Conductivity ◽  
Zinc Oxide ◽  
Indium Gallium Zinc Oxide ◽  
Oxide Thin Films ◽  
Indium Gallium

Thermal Conductivity Measurement of Submicron-Thick Aluminium Oxide Thin Films by a Transient Thermo-Reflectance Technique

2008 ◽  
Vol 25 (2) ◽  
pp. 593-596 ◽  
Author(s):  
Bai Su-Yuan ◽  
Tang Zhen-An ◽  
Huang Zheng-Xing ◽  
Yu Jun ◽  
Wang Jia-Qi
Keyword(s):  
Thin Films ◽  
Thermal Conductivity ◽  
Aluminium Oxide ◽  
Conductivity Measurement ◽  
Thermal Conductivity Measurement ◽  
Oxide Thin Films

Application of the three omega method for the thermal conductivity measurement of polyaniline

2007 ◽  
Vol 101 (8) ◽  
pp. 083507 ◽  
Author(s):  
Pankaj B. Kaul ◽  
Kevin A. Day ◽  
Alexis R. Abramson
Keyword(s):  
Thermal Conductivity ◽  
Conductivity Measurement ◽  
Thermal Conductivity Measurement ◽  
Omega Method ◽  
Three Omega Method

Observation of decreasing resistivity of amorphous indium gallium zinc oxide thin films with an increasing oxygen partial pressure

2017 ◽  
Vol 121 (4) ◽  
pp. 045305 ◽  
Author(s):  
Anup K. Singh ◽  
Sonachand Adhikari ◽  
Rajeev Gupta ◽  
Deepak
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Oxygen Partial Pressure ◽  
Partial Pressure ◽  
Indium Gallium Zinc Oxide ◽  
Oxide Thin Films ◽  
Indium Gallium

Gas thermal conductivity measurement based on the three-omega method

2012 ◽  
Author(s):  
Sebastian Gauthier ◽  
Philippe Combette ◽  
Alain Giani
Keyword(s):  
Thermal Conductivity ◽  
Conductivity Measurement ◽  
Thermal Conductivity Measurement ◽  
Omega Method ◽  
Three Omega Method

Effects of bombardment of negative oxygen ions on amorphous indium gallium zinc oxide thin films by superimposed rf/dc magnetron sputtering

2014 ◽  
Vol 7 (3) ◽  
pp. 031401 ◽  
Author(s):  
DooHyun Kim ◽  
JinNyoung Jang ◽  
SooBok Yoon ◽  
MunPyo Hong
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Indium Gallium Zinc Oxide ◽  
Dc Magnetron Sputtering ◽  
Oxide Thin Films ◽  
Oxygen Ions ◽  
Indium Gallium

Dry Etching Characteristics of Amorphous Indium-Gallium-Zinc-Oxide Thin Films

2012 ◽  
Vol 14 (10) ◽  
pp. 915-918 ◽  
Author(s):  
Yanbin Zheng ◽  
Guang Li ◽  
Wenlong Wang ◽  
Xiuchang Li ◽  
Zhigang Jiang
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Dry Etching ◽  
Indium Gallium Zinc Oxide ◽  
Oxide Thin Films ◽  
Indium Gallium
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