Effects of bombardment of negative oxygen ions on amorphous indium gallium zinc oxide thin films by superimposed rf/dc magnetron sputtering

Applied Physics Express ◽

10.7567/apex.7.031401 ◽

2014 ◽

Vol 7 (3) ◽

pp. 031401 ◽

Author(s):

DooHyun Kim ◽

JinNyoung Jang ◽

SooBok Yoon ◽

MunPyo Hong

Keyword(s):

Magnetron Sputtering ◽

Indium Gallium Zinc Oxide ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films ◽

Oxygen Ions ◽

Download Full-text

Spatial distribution of plasma parameters by a dual thermal-electrostatic probe in RF and DC magnetron sputtering discharges during deposition of aluminum doped zinc oxide thin films

Plasma Sources Science and Technology ◽

10.1088/1361-6595/abec25 ◽

2021 ◽

Vol 30 (4) ◽

pp. 045002

Author(s):

Mihai-Andrei Petrea ◽

Eugen Stamate

Keyword(s):

Spatial Distribution ◽

Magnetron Sputtering ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films ◽

Plasma Parameters ◽

Aluminum Doped Zinc Oxide ◽

Electrostatic Probe

Download Full-text

Properties of double-layered Ga-doped Al-zinc-oxide/titanium-doped indium–tin-oxide thin films prepared by dc magnetron sputtering applied for Si-based thin film solar cells

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.3651099 ◽

2011 ◽

Vol 29 (6) ◽

pp. 06B104

Author(s):

Chao-Chun Wang ◽

Dong-Sing Wuu ◽

Yang-Shih Lin ◽

Shui-Yang Lien ◽

Yung-Chuan Huang ◽

...

Keyword(s):

Thin Film ◽

Solar Cells ◽

Magnetron Sputtering ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Thin Film Solar Cells ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films

Download Full-text

Room temperature DC magnetron sputtering deposition of hydrogenated aluminum doped zinc oxide thin films on polyethylene terephthalate substrates

Materials Letters ◽

10.1016/j.matlet.2013.05.063 ◽

2013 ◽

Vol 106 ◽

pp. 363-365 ◽

Author(s):

Ke Zhu ◽

Ye Yang ◽

Tiefeng Wei ◽

Ruiqin Tan ◽

Ping Cui ◽

...

Keyword(s):

Magnetron Sputtering ◽

Polyethylene Terephthalate ◽

Room Temperature ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films ◽

Sputtering Deposition ◽

Aluminum Doped Zinc Oxide

Download Full-text

Electrical mechanism analysis of Al2O3 doped zinc oxide thin films deposited by rotating cylindrical DC magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2011.04.084 ◽

2011 ◽

Vol 519 (20) ◽

pp. 6910-6915 ◽

Author(s):

Hyeongsik Park ◽

Kyungsoo Jang ◽

Krishna Kumar ◽

Shihyun Ahn ◽

Jaehyun Cho ◽

...

Keyword(s):

Magnetron Sputtering ◽

Mechanism Analysis ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films

Download Full-text

Observation of decreasing resistivity of amorphous indium gallium zinc oxide thin films with an increasing oxygen partial pressure

Journal of Applied Physics ◽

10.1063/1.4974850 ◽

2017 ◽

Vol 121 (4) ◽

pp. 045305 ◽

Author(s):

Anup K. Singh ◽

Sonachand Adhikari ◽

Rajeev Gupta ◽

Deepak

Keyword(s):

Oxygen Partial Pressure ◽

Partial Pressure ◽

Indium Gallium Zinc Oxide ◽

Oxide Thin Films ◽

Download Full-text

P‐15: Thermal Conductivity Measurement of Indium‐Gallium‐Zinc‐Oxide Thin Films Utilizing Three‐Omega Method

SID Symposium Digest of Technical Papers ◽

10.1002/sdtp.14138 ◽

2020 ◽

Vol 51 (1) ◽

pp. 1365-1368

Author(s):

Rauf Khan ◽

Shim Chang-Hoon ◽

Reiji Hattori

Keyword(s):

Thermal Conductivity ◽

Conductivity Measurement ◽

Thermal Conductivity Measurement ◽

Indium Gallium Zinc Oxide ◽

Oxide Thin Films ◽

Omega Method ◽

Indium Gallium ◽

Three Omega Method

Download Full-text

Dry Etching Characteristics of Amorphous Indium-Gallium-Zinc-Oxide Thin Films

Plasma Science and Technology ◽

10.1088/1009-0630/14/10/11 ◽

2012 ◽

Vol 14 (10) ◽

pp. 915-918 ◽

Author(s):

Yanbin Zheng ◽

Guang Li ◽

Wenlong Wang ◽

Xiuchang Li ◽

Zhigang Jiang

Keyword(s):

Dry Etching ◽

Indium Gallium Zinc Oxide ◽

Oxide Thin Films ◽

Download Full-text

Sensing Properties of Indium-Gallium-Zinc-Oxide Thin Films under the Influence of Thickness and Annealing Ambient

Journal of The Electrochemical Society ◽

10.1149/1945-7111/ac0603 ◽

2021 ◽

Author(s):

Sunil Babu Eadi ◽

Hyun Jin Shin ◽

Ki-Woo Song ◽

Hyun Woong Choi ◽

Hi Deok Lee

Keyword(s):

Indium Gallium Zinc Oxide ◽

Oxide Thin Films ◽

Sensing Properties ◽

Download Full-text

Effect of Enhanced Plasma Density on the Properties of Aluminium Doped Zinc Oxide Thin Films Produced by DC Magnetron Sputtering

Journal of Material Science and Technology ◽

10.1016/s1005-0302(11)60080-7 ◽

2011 ◽

Vol 27 (5) ◽

pp. 393-397 ◽

Author(s):

Jun Gong ◽

Xiaobo Zhang ◽

Zhiliang Pei ◽

Chao Sun ◽

Lishi Wen

Keyword(s):

Magnetron Sputtering ◽

Plasma Density ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films

Download Full-text

Physical properties of transparent conducting indium doped zinc oxide thin films deposited by pulsed DC magnetron sputtering

Journal of Electroceramics ◽

10.1007/s10832-008-9530-2 ◽

2008 ◽

Vol 23 (2-4) ◽

pp. 536-541 ◽

Author(s):

Young Ran Park ◽

Donggeun Jung ◽

Ki-Chul Kim ◽

Su Jeong Suh ◽

Tae Seok Park ◽

...

Keyword(s):

Magnetron Sputtering ◽

Physical Properties ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films ◽

Transparent Conducting ◽

Pulsed Dc ◽

Pulsed Dc Magnetron Sputtering

Download Full-text