Techniques in Proper Orthogonal Decomposition and Component Mode Synthesis for the Dynamic Simulation of Complex MEMS Devices and Their Applications

MEMS/NEMS ◽  
2007 ◽  
pp. 111-150 ◽  
Author(s):  
W. Z. Lin ◽  
S. P. Lim ◽  
Y. C. Liang
Author(s):  
Wentao Hao ◽  
Ling Tian ◽  
Bingshu Tong

Because of their good performance to speed up MEMS system simulation processes, macromodels have aroused lots of attentions of scientists in the last decades. However, studies on FSI (Fluid-Structure Interaction) MEMS devices still can not satisfy the macromodeling requests because of the high complexity of fluid fields. A new method based on modal analysis and POD (Proper Orthogonal Decomposition) is tentatively put forward to reduce the order of FSI MEMS models. The structure macromodeling theory is firstly reviewed. Then the fluid field macromodeling approach is discussed in detail. At last, a 2D fixed-fixed micro-beam is analyzed and the results show that the macromodel extracted in this method can highly decrease the system degrees of freedom, while its precision is still comparable with that of detailed models.


Author(s):  
David Binion ◽  
Xiaolin Chen

Due to its ease of implementation, electrostatic operation is one of the most common actuation/sensing techniques for micro-electro-mechanical-systems (MEMS). One such MEMS device is an electrostatic microresonator which is used to generate or filter signals. MEMS resonators are operated by pre-stressing the structure with a large bias voltage and then applying a small magnitude harmonic voltage. Accurate simulation requires models that describe the dynamic frequency response while accounting for stress stiffening. Finite Element Analysis (FEA) has widely been used to obtain accurate simulations of MEMS devices, however, a dense FEA mesh may be required resulting in computationally demanding models. To improve the computational efficiency, Model Order Reduction methods have regularly been used. In particular, Proper Orthogonal Decomposition (POD) has witnessed an increase in MEMS simulation. In this paper, POD has been investigated and implemented to model the dynamic behavior of a microresonator. An FEM model of a microresonator beam structure was produced and POD was employed to simulate the pre-stressed frequency response of the device. A pre-stressed harmonic simulation was performed using a full FEM model for comparison. It was found that the reduced model and full model responses were well matched while the computational time was drastically reduced through the use of POD.


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