Nonlinear Approach for Strain Energy Release Rate in Micro Cantilevers

An analytical Mixed Mode I & II crack propagation model is used to analyze the experimental results of stiction failed micro cantilevers on a rigid substrate and to determine the critical strain energy release rate (adhesion energy). Using nonlinear beam deflection theory, the shape of the beam being peeled off of a rigid substrate can be accurately modeled. Results show that the model can fit the experimental data with an average root mean square error of less than 5 ran even at relatively large deflections which happens in some MEMS applications. The effects of surface roughness and/or debris are also explored and contrasted with perfectly (atomically) flat surfaces. Herein it is shown that unlike the macro-scale crack propagation tests, the surface roughness and debris trapped between the micro cantilever and the substrate can drastically effect the energy associated with creating unit new surface areas and also leads to some interesting phenomena. The polysilicon micro cantilever samples used, were fabricated by SUMMIT V™ technology in Sandia National Laboratories and were 1000 μm long, 30 μm wide and 2.6 μm thick.

Rheological Behavior and Microstructure of Flame Retardant Polypropylene Composites

Polypropylene (PP)/magnesium hydroxide (MDH) composite was melt-mixed using a twin-screw extruder. Two types of MDH were used, one with the modification of silane and another without. The rheological behavior was measured by capillary and dynamical rheometer. Microstructure of these composites was observed by SEM. Their flame retardancy was characterized by oxygen index and Horizontal/Vertical burning test. Results showed that shear viscosity and complex viscosity of PP with modified MDH were lower than that of PP with non-modified MDH. SEM results also showed a better dispersion of silane modified MDH in PP matrix. With the increase of MDH content, the oxygen index of composites was increased. When the content was increased to 60 wt%, the composite was UL94 HB and V-1.

Vapor Trapping Membrane for Reverse Osmosis

This paper presents a concept for desalination by reverse osmosis (RO) using a vapor-trapping membrane. The membrane is composed of hydrophobic nanopores and separates the feed salt water and the fresh water (permeate) side. The feed water is vaporized by applied pressure and the water vapor condenses on the permeate side accompanied by recovery of latent heat. A probabilistic model was developed for transport of water vapor inside the nanopores, which predicted 3–5 times larger mass flux than conventional RO membranes at temperatures in the range of 30–50°C. An experimental method to realize short and hydrophobic nanopores is presented. Gold was deposited at the entrance of alumina pores followed by modification using an alkanethiol self-assembled monolayer. The membranes were tested for defective or leaking pores using a calcium ion indicator (Fluo-4). This method revealed the existence of defect-free areas in the 100–200 μm size range that are sufficient for flux measurement. Finally, a microfluidic flow cell was created for characterizing the transport properties of the fabricated membranes.

Optothermal Analyte Manipulation With Temperature Gradient Focusing

An optothermal analyte preconcentration method is introduced in this work based on temperature gradient focusing. The present approach offers a flexible, noncontact technique for focusing and transporting of analytes. Here, we use a commercial video projector and an optical system to generate heat and control the heat source position, size and power. This heater is used to focus a sample model analyte, fluorescent dye, at an arbitrary location along the microchannel. Optothermal manipulation of the focused band was demonstrated by projecting a series of images with a moving light band.

The Influence of Ambient Pressure on the Dynamic Response of RF MEMS Switches

A study of the dynamic behavior of an RF MEMS switch is presented at different operating conditions. Experimental results for the actuation and release time and Q-factor as a function of the ambient pressure and actuation voltage are compared to theoretical predictions based on existing model. Optimal operating conditions (ambient pressure and actuation voltage) are determined based on two criterions: minimal actuation and release time and minimal oscillations upon switch release. In light of the experimental results optimal operating conditions determined to be 1.4Vpi at a pressure of a few torrs where actuation and release time are equal and short enough with no release oscillations. Three pressure regimes are identified with characteristic behavior of the Q-factor and actuation and release time in each regime. These behaviors have significant implications in many MEMS devices, especially RF MEMS switches.

Investigation of the Oscillatory Behavior of Electrostatically-Actuated Microbeams

Vibrations of electrostatically-actuated microbeams are investigated. Effects of electrostatic actuation, axial stress and midplane stretching are considered in the model. Galerkin’s decomposition method is utilized to convert the governing nonlinear partial differential equation to a nonlinear ordinary differential equation. Homotopy perturbation method (i.e. a special and simpler case of homotopy analysis method) is utilized to find analytic expressions for natural frequencies of predeformed microbeam. Effects of increasing the voltage, midplane stretching, axial force and higher modes contribution on natural frequency are also studied. The anayltical results are in good agreement with the numerical results in the literature.

On Chip Micropumping for Biofluids by Temperature Biased AC Electrothermal Effect

For biofluids, very limited voltage can be applied without causing reactions, even with AC voltages, so conventional electrokinetic pumps cannot function effectively. Here two innovative ACEK micropump designs are proposed, which are expected to solve the long-standing problem of on-chip pumping for biofluids. This work focuses on exploiting external heat flux or temperature bias to enhance micropumping by AC electrothermal effect. AC electrothermal effect is ubiquitous as long as electric current flows through fluid. Investigating the interplay between electric field and temperature field will be useful for the research area of electrokinetics as a whole. New methods to enhance on chip micorpumping have been presented in this paper. Inhomogenous electric fields can cause uneven Joule heating of the fluid, which generates thermal gradients and leads to mobile charges in fluid bulk. The two pumping schemes circumvent the voltage problem by introducing extra thermal gradient to generate mobile charges. The free charges then move under the electric field and induce microflows due to viscosity. Numerical simulation and preliminary experiments have successfully demonstrated the improvement in flow velocity. It enriches the repertoire for the design of ACEK micropump, and affords us more flexibility when dealing with micropumping tasks. The micropumping mechanisms proposed here are simple, robust, of small form factor, can be readily integrated into microsystems at low cost. The proposed fabrication and micropump integration process is highly manufacturable with various materials and can be easily incorporated into a fully integrated biochip. The added design flexibility from this project will lend the pump design well towards many lab-on-a-chip applications.

Analysis Tools for Thermally Driven Microfluidics

Thermally driven microfluidics, that is, flow that is driven by a temperature gradient, has applications from lab-on-a-chip to electronics cooling. Development of such devices requires tools to predict and probe temperature and velocity fields. We have developed analytical, numerical, and experimental analysis tools for design and characterization of thermally driven microfluidic systems. We demonstrate these tools through the analysis of two different systems: an electrothermal microstirring biochip, and a high aspect heat pipe for cooling. First, a numerical model is developed for temperature and velocity fields, in a hybrid electrothermal-buoyancy microstirring device. An analytical tool, the electrothermal Rayleigh number, is used to further explore the relative importance of electrothermal and buoyancy driven flow. Finally, two experimental thermometry techniques are described: fluorescence thermometry and infrared thermometry. These analytical, numerical, and experimental tools are useful in the design of thermally driven microfluidic systems, as demonstrated here through the development and analysis of microstirring and heat pipe systems.

Performance Enhancement by Dynamic Valve Timing of a Multistage Vacuum Micropump

This paper presents the results of a theoretical analysis of dynamic valve timing on the performance of a multistage peristaltic vacuum micropump. Prior work has shown that for optimum steady state performance a fixed valve timing which depends on the operating pressure can be found. However, the use of a fixed valve timing could hinder performance for transient operation when the pump is evacuating a fixed volume. At the beginning of the transient the pump operates at low pressure difference and a large flow rate would be desirable. As the pump reaches high vacuum the pressure difference is large and the flow rate is necessarily small. Astle and coworkers1–3 have shown using a reduced order model that for steady state operation short valve open time results in lower inlet pressure and flow-rate and conversely. Here we extend the model of Astle and coworkers to include transient operation, multiple coupled stages and non-ideal leaky valves, and show that dynamic valve timing (DVT) reduces the transient duration by 30% compared to high vacuum pressure valve timing. The results also show a significant reduction in resonant frequency of the pump at low pressures, and quantify the effect of valve leakage.

Dynamic Performance of an Electromagnetically Actuated Valveless Micropump

The dynamic performance of a valveless electromagnetic micropump is studied by a fluid–diaphragm coupling model. The model includes fluid inertia and considers the electromagnetic action on the flexible diaphragm of the pump as a sinusoidal force. Fluid pressure acting on the diaphragm is obtained instantaneously with solving the coupling equation through a transient dynamic mesh simulation. This treatment avoids omitting the phase shift between pressure force and displacement of the diaphragm. Furthermore, the model removes almost empirical parameters. A MEMS prototype is fabricated and the measured backpressure attains to 2.5cmH2O when using a 65mA sinusoidal driving current at frequency of 30Hz.