Apertureless Scanning Near-Field Optical Lithography

2020 ◽  
pp. 113-132
Author(s):  
Ignacio Falcón Casas ◽  
Wolfgang Kautek
Keyword(s):  
Near Field ◽  
Optical Lithography

Quasi-3D plasmonic coupling scheme for near-field optical lithography and imaging

2015 ◽  
Vol 40 (16) ◽  
pp. 3918 ◽  
Author(s):  
Yuan Wang ◽  
Zhidong Du ◽  
Yongshik Park ◽  
Chen Chen ◽  
Xiang Zhang ◽  
...  
Keyword(s):  
Near Field ◽  
Optical Lithography ◽  
Coupling Scheme ◽  
Plasmonic Coupling

Mold-assisted near-field optical lithography

1999 ◽  
Vol 46 (1-4) ◽  
pp. 69-72 ◽  
Author(s):  
Y. Chen ◽  
F. Carcenac ◽  
C. Ecoffet ◽  
D.J. Lougnot ◽  
H. Launois
Keyword(s):  
Near Field ◽  
Optical Lithography

Analysis and optimization of multilayer silver superlenses for near-field optical lithography

2007 ◽  
Vol 394 (2) ◽  
pp. 197-202 ◽  
Author(s):  
David O.S. Melville ◽  
Richard J. Blaikie
Keyword(s):  
Near Field ◽  
Optical Lithography

Near-field optical lithography of a conjugated polymer

2003 ◽  
Vol 82 (4) ◽  
pp. 526-528 ◽  
Author(s):  
Robert Riehn ◽  
Ana Charas ◽  
Jorge Morgado ◽  
F. Cacialli
Keyword(s):  
Conjugated Polymer ◽  
Near Field ◽  
Optical Lithography

70 nm Features on 140 nm period using evanescent near field optical lithography

2000 ◽  
Vol 53 (1-4) ◽  
pp. 237-240 ◽  
Author(s):  
M.M. Alkaisi ◽  
R.J. Blaikie ◽  
S.J. McNab
Keyword(s):  
Near Field ◽  
Optical Lithography
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