Secondary Particle Generation with Accelerators

Author(s):  
Sören Möller
Author(s):  
N. M. Astafyeva ◽  
N. A. Dobrotin ◽  
I. M. Dremin ◽  
E. L. Feinberg ◽  
L. A. Goncharova ◽  
...  

Author(s):  
Marylyn Bennett-Lilley ◽  
Thomas T.H. Fu ◽  
David D. Yin ◽  
R. Allen Bowling

Chemical Vapor Deposition (CVD) tungsten metallization is used to increase VLSI device performance due to its low resistivity, and improved reliability over other metallization schemes. Because of its conformal nature as a blanket film, CVD-W has been adapted to multiple levels of metal which increases circuit density. It has been used to fabricate 16 MBIT DRAM technology in a manufacturing environment, and is the metallization for 64 MBIT DRAM technology currently under development. In this work, we investigate some sources of contamination. One possible source of contamination is impurities in the feed tungsten hexafluoride (WF6) gas. Another is particle generation from the various reactor components. Another generation source is homogeneous particle generation of particles from the WF6 gas itself. The purpose of this work is to investigate and analyze CVD-W process-generated particles, and establish a particle characterization methodology.


1999 ◽  
Vol 169 (1) ◽  
pp. 72 ◽  
Author(s):  
Aleksandr A. Andreev ◽  
V.E. Yashin ◽  
Aleksandr V. Charukhchev

Author(s):  
Joon Ha Chang ◽  
Jun Young Cheong ◽  
Yoonsu Shim ◽  
Jae Yeol Park ◽  
Sung Joo Kim ◽  
...  

Co3O4 nanograins-interconnected secondary particle (Co3O4 NISP) is proposed as lithium-ion battery anode material that can offer high volumetric capacity by less formation of insulating CoO during lithiation process.


2006 ◽  
Vol 519-521 ◽  
pp. 795-802 ◽  
Author(s):  
Dominique Daniel ◽  
Gilles Guiglionda ◽  
Pierre Litalien ◽  
Ravi Shahani

Cost-efficient designs of aluminum autobody structures consist mainly of stampings using conventional technology. Progress in metallurgy and forming processes has enabled aluminum body panels to achieve significant market share, particularly for hoods. Fast bake hardening alloys with better hemming performance were developed for improved outer panel sheet products. Specific guidelines for handling and press working were established to form aluminum panels using similar schedules and production lines as steel parts. Stamping productivity was improved by optimization of the trimming process to reduce sliver/particle generation and resulting end-of-line manual rework. Both hemming formability and trimming quality not only depend on tooling setup but also on microstructural features, which govern intrinsic alloy ductility. Targets for the next high volume aluminum car body applications, such as roof panels and doors, require higher strength and/or better formability. The challenges of complex stampings can be met with optimized alloys and lubricants, with improved numerical simulation to fine-tune stamping process parameters, and with the introduction of new technologies. Warm forming was examined as a potential breakthrough technology for high volume stamping of complex geometries.


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