Flexible Control System Used in the Nano-technological Production Flow

Author(s):  
Popan Gheorghe ◽  
Angelescu Dorin
Author(s):  
Paula Stael Silva Barbosa ◽  
Jessica Bertolino Gregorio ◽  
Matusalem Martins Lanes ◽  
Nata Franco Soares de Bem

2007 ◽  
Vol 2007 (0) ◽  
pp. _2P1-B12_1-_2P1-B12_2
Author(s):  
Yasuo HAYASHIBARA ◽  
Tomoaki YOSHIDA ◽  
Eiji KOYANAGI

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